PI P-73 Series User Manual Download

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Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany

Phone +49 721 4846-0 · Fax +49 721 4846-1019 · E-mail [email protected]

PZ103E

P-73x Nanopositioners

User Manual

Version: 1.0.0

Date: 10.12.2012

This document describes the following
products:



P-733, P-734

Piezo XY stage
P-733.2CD/.2CL
P-733.2DD direct drive
P-734.2CD/.2CL ultra-straight motion



P-733

Piezo XYZ stage
P-733.3CD/.3CL
P-733.3DD direct drive



P-733

Precision Z stage
P-733.ZCD/.ZCL

.2CD/.3CD/.ZCD/.2DD/.3DD with Sub-D
connector
.2CL/.3CL/.ZCL with LEMO connector

Summary of Contents for P-73 Series

Page 1: ...ers User Manual Version 1 0 0 Date 10 12 2012 This document describes the following products P 733 P 734 Piezo XY stage P 733 2CD 2CL P 733 2DD direct drive P 734 2CD 2CL ultra straight motion P 733 Piezo XYZ stage P 733 3CD 3CL P 733 3DD direct drive P 733 Precision Z stage P 733 ZCD ZCL 2CD 3CD ZCD 2DD 3DD with Sub D connector 2CL 3CL ZCL with LEMO connector ...

Page 2: ...9 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2012 Physik Instrumente PI GmbH Co KG Karlsruhe Deutschland The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructio...

Page 3: ... 2 2 Piezo XYZ Stage 10 3 2 3 Precision Z Stage 11 3 3 Product View 11 3 4 Scope of Delivery 12 3 5 Technical Features 12 3 5 1 PICMA Piezo Actuators 12 3 5 2 Flexure Guides 12 3 5 3 Capacitive Sensors 13 3 5 4 ID Chip Only Models with Sub D Connector 13 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation 17 5 2 Connecting the P 73x to a Protective Earth Conductor 19 5 3 Mounting th...

Page 4: ... Technical Data 37 10 1 Specifications 37 10 1 1 Data Table 37 10 1 2 Maximum Ratings 39 10 1 3 Ambient Conditions and Classifications 40 10 2 Dimensions 41 10 3 Torque for Stainless Steel Screws A2 70 46 10 4 Pin Assignment 47 10 5 Suitable Piezo Controllers 50 11 Old Equipment Disposal 53 12 EC Declaration of Conformity 55 ...

Page 5: ...ic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation If not avoided the dangerous situation will result in minor injury Action...

Page 6: ...uct example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website Product Document E 625 CR Controller PZ166E E...

Page 7: ...oftware Manual NanoCapture SM71E Software Manual P 5xx P 6xx P 7xx Piezo Positioning Systems PZ240EK Short Instructions 1 4 Downloading Manuals 1 Open the PI website http www pi portal ws 2 Click Downloads 3 Click the corresponding category e g P Piezo Actuators Nanopositioning Scanning Systems 4 Click the corresponding product code e g P 733 5 Click Documents 6 Click the desired manual and save i...

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Page 9: ...n of small objects The specifications of the P 73x apply to horizontal mounting Depending on the model the motion is performed as follows in two axes horizontally in three axes horizontally and vertically in one axis vertically The intended use of the P 73x is only possible in combination with suitable drive and control electronics p 50 available from PI The electronics is not included in the scop...

Page 10: ...and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P 73x Mechanical forces can damage or misalign the P 73x Avoid impacts that affect the P 73x Do not drop the P 73x Do not exceed the maximum permissible compressive tensile stress The P 73x is maintenance free and achieves its positioning accuracy as a result of the optim...

Page 11: ... Technical Notes If you pass the P 73x on to other users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the P 73x after having read and understood this user manua...

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Page 13: ... of the piezo actuators and levers is used by the P 73x to achieve travel ranges of up to 100 μm with resolutions in the nanometer range In order to achieve the specifications stated in the data table p 37 the stage is calibrated at the factory as a system component with suitable electronics The electronics and mechanical system only offer optimum performance as a complete calibrated system The el...

Page 14: ...s Parallel Metrology Sub D Connector P 734 2CD High Precision XY Nanopositioning System with Minimum Runout 100 µm 100 µm Capacitive Sensors Parallel Metrology Sub D Connector P 734 2CL High Precision XY Nanopositioning System with Minimum Runout 100 µm 100 µm Capacitive Sensors Parallel Metrology LEMO Connector 3 2 2 Piezo XYZ Stage Model Description P 733 3CD Precision XYZ Nanopositioning System...

Page 15: ... Vertical Stage 100 µm Capacitive Sensor Sub D Connector P 733 ZCL Compact Precision Nanopositioning Vertical Stage 100 µm Capacitive Sensor LEMO Connector 3 3 Product View The illustration serves as an example and can differ from your stage model Figure 1 Example of product view 1 Moving platform 2 Base body 3 Cable outlet 4 Protective earth connection ...

Page 16: ...inst humidity and failure due to increased leakage current by a ceramic insulation layer In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are therefore backlash maintenance and wear free 3 5 2 Flexure Guides P 73x stages have flexure guides flexures for frictionle...

Page 17: ...pacitive sensors achieve the best resolution stability and bandwidth 3 5 4 ID Chip Only Models with Sub D Connector An ID chip is located in the Sub D connector of the stage When the stage is calibrated at the factory with digital electronics the calibration data is saved together with specific product information on the ID chip When switched on digital electronics read the data from the ID chip o...

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Page 19: ...ompare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned 4 Unpacking ...

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Page 21: ...eral hours Touching or short circuiting the contacts in the connector of the P 73x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction Do not open the P 73x Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor Do not pull out the conne...

Page 22: ...correctly mounted parts can damage the P 73x Only mount the P 73x and the loads on the mounting fixtures holes intended for this purpose NOTICE Damage due to incorrectly tightened screws Incorrectly tightened screws can cause damage Observe the torque range p 46 given for the screws used during installation INFORMATION Extended cables can affect the performance of the P 73x Do not use cable extens...

Page 23: ...serve the applicable standards for mounting the protective earth conductor The P 73x is equipped with an M4 hole for fastening the protective earth conductor This hole is located next to the cable exit and is marked with the protective earth conductor symbol see Dimensions p 41 Prerequisite You have read and understood the General Notes on Installation p 17 The stage is not connected to the electr...

Page 24: ...ssary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P 73x as shown in the profile view 3 Tighten the M4 screw with at least three rotations and a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the pr...

Page 25: ... 73x on surfaces that have the same or similar thermal expansion properties as the P 73x e g surfaces made of aluminum NOTICE Tensile stress on piezo actuator with vertical mounting When the stage is mounted vertically a tensile stress can result in particular alignments that destroys the piezo actuator If you want to mount the P 73x vertically contact our customer service department p 35 NOTICE P...

Page 26: ...ries Screws of appropriate size and length see Dimensions p 41 Suitable tools Mounting the stage on a surface 1 Position the stage on an even surface 2 For the P 73x 2Cx and P 733 3Cx models Ensure a distance of at least 0 5 mm between the stage and the surrounding objects 3 Fasten the stage to the mounting holes see figure with suitable screws Observe the specified torque range p 46 while doing s...

Page 27: ...least 20 μm For applications with great temperature changes Only affix loads on the P 73x that have the same or similar thermal expansion properties as the P 73x e g loads made of aluminum NOTICE Center of load at unsuitable position If the center of load is located far outside of the moving platform e g high set ups and long levers the P 73x can be damaged from high strain on the flexure guides h...

Page 28: ...s p 41 show the positive direction of motion Center of load at the optimum position Figure 4 Example of an optimally affixed load Center of load at an unsuitable position Figure 5 High set up and center of load far above the moving platform Figure 6 Long lever and center of load on the side of the moving platform ...

Page 29: ... tools Affixing the Load Only affix loads to the threaded holes intended for this purpose see Dimensions p 41 and with suitable screws Observe the specified torque range p 46 while doing so Affix the load so that it is centered and that the center of load is on the moving platform Avoid high set ups with the center of load far above the moving platform Avoid long levers with the center of load on ...

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Page 31: ...h conductor during operation If the protective earth conductor has to be temporarily removed e g for modifications reconnect the P 73x to the protective earth conductor before starting it up again NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 73x in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electri...

Page 32: ... 73x Only operate the P 73x with controllers drivers and original accessories from PI Do not exceed the operating voltage range p 39 for which the P 73x is specified Only operate the P 73x when the operating voltage is properly connected see Pin Assignment p 47 NOTICE Uncontrolled oscillation Oscillations can cause irreparable damage to the stage Oscillations are indicated by a humming and can res...

Page 33: ...used Note the assignment of the stage axes to the controller channels which is given by the calibration label of the piezo servo controller If the piezo servo controller or the stage has to be replaced recalibrate the axis displacement see controller manual or contact our customer service department p 35 INFORMATION Sound and vibration e g footfall impacts can be transmitted to the stage and can a...

Page 34: ...perature stability Before demounting e g before cleaning and transporting the P 73x and for modifications The P 73x is discharged through the internal discharge resistor of the controller from PI Discharging a P 73x that is connected to the controller In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V on the controller In open loop operation Set t...

Page 35: ...hanical components and piezo actuators Loosened screws cause a loss in positioning accuracy Only loosen screws according to the instructions in this manual Do not open the P 73x 7 2 Cleaning the P 73x Prerequisites You have discharged the piezo actuators of the P 73x p 30 You have disconnected the P 73x from the controller Cleaning the P 73x Clean the surfaces of the P 73x with a cloth slightly da...

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Page 37: ...oint adjustment see controller manual Reduced accuracy Warping of the base body or the moving platform Only mount the P 73x on surfaces with the following characteristics Evenness of at least 20 μm The thermal expansion properties are similar to those of the P 73x e g surfaces made of aluminum Only affix loads with the following characteristics on the P 73x The contact surface of the load with the...

Page 38: ...necting the stage to the controller This assignment is indicated by labels on the devices The stage starts oscillating or is positioned inaccurately Servo control parameters incorrectly set because e g the load was changed 1 Immediately switch off the servo mode of the corresponding stage axes 2 Check the settings of the servo control parameters on the controller 3 Adjust the servo control paramet...

Page 39: ... your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the relevant user manuals for your system are available for download on our website http www pi ws 9 Customer Service ...

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Page 41: ... Integrated sensor Capacitive Capacitive Capacitive Capacitive Capacitive Capacitive Open loop travel in X Y 20 to 120 V µm 115 115 33 33 110 Open loop travel in Z 20 to 120 V µm 12 14 115 Closed loop travel in X Y µm 100 100 30 30 100 Closed loop travel in Z µm 10 10 100 Open loop resolution in X Y nm 0 2 0 2 0 1 0 1 0 2 Open loop resolution in Z nm 0 1 0 1 0 2 Closed loop resolution in X Y nm 0 ...

Page 42: ... frequency in X Y Hz 370 120 g 340 120 g 1800 50 g 350 200 g Loaded resonant frequency in Z Hz 1060 120 g 530 120 g Loaded resonant frequency in X Y Hz 340 200 g 295 200 g 1550 200 g 530 200 g 250 500 g Loaded resonant frequency in Z Hz 650 200 g 635 200 g 415 200 g Compressive tensile stress capacity in the direction of travel N 300 100 300 100 300 100 300 100 300 100 50 20 Load capacity N 20 20 ...

Page 43: ...ctor CL version 2 LEMO connectors Voltage connection CD version Sub D special connector CL version 2 LEMO connectors CD version Sub D special connector CL version 3 LEMO connectors Sub D special connector Sub D special connector CD version Sub D special connector CL version 2 LEMO connectors CD version Sub D special connector CL version 1 LEMO connector Recommended controller amplifier See Suitabl...

Page 44: ...ns and Classifications The following ambient conditions and classifications must be observed for the P 73x Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 2...

Page 45: ...anopositioners PZ103E Version 1 0 0 41 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Standard tolerance according to DIN ISO 2768 f H Roughness Ra 1 6 Figure 7 P 733 2Cx ...

Page 46: ...10 Technical Data 42 Version 1 0 0 PZ103E P 73x Nanopositioners Figure 8 P 733 2DD ...

Page 47: ...10 Technical Data P 73x Nanopositioners PZ103E Version 1 0 0 43 Figure 9 P 733 3Cx ...

Page 48: ...10 Technical Data 44 Version 1 0 0 PZ103E P 73x Nanopositioners Figure 10 P 733 3DD ...

Page 49: ...10 Technical Data P 73x Nanopositioners PZ103E Version 1 0 0 45 Figure 11 P 733 ZCx ...

Page 50: ... 0 0 PZ103E P 73x Nanopositioners Figure 12 P 734 2Cx 10 3 Torque for Stainless Steel Screws A2 70 Screw Size Minimum Torque Maximum Torque M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm 0 4 Nm M2 0 15 Nm 0 2 Nm M1 6 0 06 Nm 0 12 Nm ...

Page 51: ...connections Pin Signal Function A1 inner conductor Input Piezo voltage A2 inner conductor Output Probe sensor signal nonmoving part of the capacitive sensor A2 outer conductor GND Shield 1 Bidirectional Data line for ID chip 2 GND Shield of Target Ground of ID chip when switched on 3 Input Piezo voltage 4 Free 5 Input Target sensor signal movable part of the capacitive sensor ...

Page 52: ...ignal channel 3 nonmoving part of the capacitive sensor A2 outer conductor GND Shield of Probe sensor signal channel 3 A3 inner conductor Output Probe sensor signal channel 1 nonmoving part of the capacitive sensor A3 outer conductor GND Shield of Probe sensor signal channel 1 1 Input Target sensor signal channel 2 movable part of the capacitive sensor 2 Input Target sensor signal channel 3 movabl...

Page 53: ...el 4 19 Input Piezo voltage channel 3 20 Input Piezo voltage channel 2 21 Input Piezo voltage channel 1 22 GND Shield of Target sensor signal channel 1 Stage dependent assignment of the Sub D mix connector 25W3 X used Stage Piezo Voltage Sensor Signal Probe Target Shield Chan nel 1 Pins 10 and 21 Chan nel 2 Pins 9 and 20 Chan nel 3 Pins 8 and 19 Chan nel 4 Pins 7 and 18 Channel 1 Pins A3 11 and 22...

Page 54: ...hield PZT Input Piezo voltage Ground 10 5 Suitable Piezo Controllers To operate a P 73x you need a piezo controller The device is selected depending on the type of application The table below lists suitable controllers Controller Channels P 733 2CD P 733 2DD P 734 2CD P 733 2CL P 734 2CL P 733 3CD P 733 3DD P 733 3CL P 733 ZCD P 733 ZCL E 625 CR E 665 CR controller bench top device with digital in...

Page 55: ...and E 503 3 channel amplifier Optional E 517 interface and display module 3 X X E 500 modular piezo controller with E 509 C3A control module for capacitive sensors and 3 E 505 1 channel high performance amplifier Optional E 517 interface and display module 3 X X E 500 modular piezo controller with E 509 C2A control module for capacitive sensors and 2 E 505 1 channel high performance amplifier Opti...

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Page 57: ...observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik...

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Page 59: ...12 EC Declaration of Conformity P 73x Nanopositioners PZ103E Version 1 0 0 55 12 EC Declaration of Conformity ...

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