10 Technical Data
40
Version: 1.0.0
PZ248E
P-56x Nanopositioners
P-561.3CD
P-561.3CL
P-562.3CD
P-562.3CL
P-563.3CD
P-563.3CL
P-561.3DD
Unit
Tolerance
Drive properties
Piezo ceramic
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885 in Z,
P-888 in XY
Electrical capacitance in
X / Y / Z
5.2 / 5.2 /
10.4
7.4 / 7.4 /
14.8
7.4 / 7.4 /
14.8
38 / 38 / 6
µF
±20 %
Dynamic operating current
coefficient (DOCC) in
X / Y / Z
6.5 / 6.5 / 13 4.6 / 4.6 /
9.25
3.1 / 3.1 /
6.1
106 / 106 /
50
µA /
(Hz ×
µm)
±20 %
Miscellaneous
Operating temperature
range
-20 to 80
-20 to 80
-20 to 80
-20 to 80
°C
Material
Aluminum
Aluminum
Aluminum
Aluminum
Mass
1.45
1.45
1.45
1.55
kg
±5 %
Sensor / voltage
connection
CD version: Sub-D Special, 1.5 m cable
CL version: LEMO
The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise
equivalent motion with E-725 / E-712 controller.
* With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 %
typ.
Super-invar and titanium versions available.
Ask about custom designs!
10.1.2 Maximum Ratings
P-56x stages are designed for the following operating parameters:
Stage
Maximum
Operating Voltage
Maximum Operating
Frequency (Unloaded)
Maximum Power
Consumption
P-561.3CD
P-561.3CL
–20 to +120 V
63 Hz (in X and Y)
126 Hz (in Z)
15 W (in X and Y)
30 W (in Z)
P-561.3DD
–20 to +120 V
306 Hz (in X and Y)
350 Hz (in Z)
34 W (in X and Y)
17 W (in Z)
P-562.3CD
P-562.3CL
–20 to +120 V
53 Hz (in X and Y)
105 Hz (in Z)
21 W (in X and Y)
43 W (in Z)
P-563.3CD
P-563.3CL
–20 to +120 V
46 Hz (in X and Y)
83 Hz (in Z)
21 W (in X and Y)
43 W (in Z)
