13 Appendix
H-820 Hexapod Microrobot
MS207E
Version: 2.3.0
53
In this Chapter
Explanations of the Performance Test Sheet .............................................................................. 53
EU Declaration of Conformity ...................................................................................................... 55
13.1
Explanations of the Performance Test Sheet
The hexapod is tested for the positioning accuracy of the translational axes before delivery. The
performance test sheet is included in the scope of delivery.
The following figure shows the test setup used.
Figure 15: Test setup for measuring the X or Y axis.
1
Laser interferometer
2
Mirror
3
Bench
The following test cycles are performed:
Motion over the entire travel range with at least 20 measuring points, in at least five
cycles.
Motion over partial sections, e.g., ±1 mm in increments of for example, 10 µm
13
Appendix
