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5.4 Stillsetzen der Turbopumpe
Zum Stillsetzen der Turbopumpe über
längere Zeit ist folgendes zu beachten:

– Bei der Turbopumpe ist ein Wechsel

des Betriebsmittelspeichers durchzu-
führen (siehe 6.1).

Hinweis:
Die Gebrauchsfähigkeit des Betriebs-
mittels TL 011 beträgt ohne Betrieb

2 Jahre

.

– Hochvakuumflansch der Turbo-

pumpe verschließen und Pumpe über
Vorvakuumflansch evakuieren.

– Turbopumpe mit trockener Luft

fluten.

– Vorvakuumanschluß verschließen.
– Pumpe 

senkrecht

auf den Gummi-

füßen lagern.

– In Räumen mit feuchter oder aggres-

siver Atmosphäre ist die Turbopum-
pe zusammen mit einem Beutel
Trockenmittel, z.B. Silicagel, in einen
Plastikbeutel einzuschweißen

5.4 Shutting down the Turbo Pump
For extended shutdowns of the turbo
pump, the following must be observed:

– The operating fluid reservoir must be

changed on the turbo pump (see 6.1).

Please note:
The usability of the TL 011 oil is

2 years

if the pump is not operated.

– Close the high-vacuum flange of the

turbo pump and evacuate the pump
via the fore-vacuum flange.

– Vent the turbo pump with dry air.
– Close the fore-vacuum connection.
– Store the pump in 

vertical 

position

on its rubber legs.

– In rooms with a moist or aggressive

atmosphere, the turbo pump must be
sealed in a plastic bag, together with
a bag of desiccant, e.g. silicagel.

5.4 Arrêt de la pompe turbo
Lorsque la pompe turbo doit être
arrêtée pour une période prolongée, il
faut veiller à ce qui suit:

– Le réservoir de fluide moteur de la

pompe turbo doit être remplacé (voir
6.1).

Remarque:
le fluide moteur TL 011 est utilisable
durant 

2 ans

lorsque la pompe n’est

pas en fonctionnement.

– Fermer la bride de vide élevé de la

pompe turbo et vider la pompe via la
bride de vide primaire.

– Effectuer une remise à l’air sec de la

pompe turbo.

– Fermer le raccord de vide primaire.
– Placer la pompe 

verticalement

sur

les pieds en caoutchouc.

– Dans les locaux à l’atmosphère

humide ou agressive, la pompe turbo
doit être mise avec un sachet de
dessicateur dans un sachet en
plastique qui sera soudé.

Notizen / Notes

Summary of Contents for TPH 055

Page 1: ...triebsanleitung Operating Instructions Instructions de service Turbomolekularpumpen Turbomolecular Pumps Pompe turbomoléculaire TPH 062 TPU 062 TPH 055 PM 800 260 BN E 9702 N 3717 TPH 062 TPU 062 TPH 055 ...

Page 2: ...n the Turbo Pump 6 Maintenance 6 1 Changing the Operating Fluid Reservoir 6 2 Cleaning the Turbo Pump 6 2 1 Cleaning the Pump in fully assembled Condition 6 3 Testing the Drive Motor 6 3 1 Testing the Motor TPH U 062 with TCP 121 380 Electronic Drive Unit 6 3 2 Testing the Motor TPH U 062 without TCP Electronic Drive Unit 6 3 3 Testing the Motor of the TPH 055 with TCP 015 Electronic Drive Unit 6 ...

Page 3: ...ling Ambient temperature 35 C and heated pumps water cooling Connection of venting devices via G 1 8 connecting thread DN 10 ISO KF components via adapter PM 006 702 see 4 5 Electrical connection in accordance with the valid local regulations special requirements see Section 4 6 OPERATION Connect all required optional accessories Section 4 3 4 6 SWITCHING on the turbo pump Press the switch S1 on t...

Page 4: ...ricated with TL 011 with ceramic balls replace able CHANGING the operating fluid for ball bearings To change the operating fluid the operating fluid reservoir must be exchanged completely 6 1 Do no fill in any additional operating fluid CLEANING Light contamination Clean in pure alcohol Please note relevant regulations concerning the handling of solvents must be observed see 6 2 Severe contaminati...

Page 5: ... the German Industrial Standard DIN 8418 If you perform repair or maintenance work on units which have come into contact with substances which are detrimental to health please observe the relevant regulations If you return units to us for repair or maintenance work please follow the instructions below contaminated units radioactively or chemically etc must be decontaminated in accordance with the ...

Page 6: ... with the EEC Specification dated 18 September 1979 Article 2 and in the U S A as materials in accordance with the Code of Federal Regulations CFR 49 Part 173 240 Definition and Preparation Technical modifications reserved Il vous est également loisible de nous laisser le soin de décontaminer nous mêmes ces appareils exceptés les appareils qui seraient radioactivement contaminés Dans ce cas la com...

Page 7: ...ecognize dangers and take preventive measures Any use by unauthorized personnel or careless handling may increase the potential danger The switch off procedures described in the attached operating instructions must be observed in all installation commissioning operating and maintenance work No operating modes must be used which may affect the safety of the operator and pump All unauthorized modifi...

Page 8: ...ny hazardous media to be pumped Appropriate safety precaution instructions must be provided 1 3 Other Information The turbo pump connecting cable and electronic drive unit form an operational unit together with an appropriate backing pump The contents of the consignment is shown in Fig 1 and 2 The TPH and TPU turbo pumps are of identical design They only differ in their intake flange TPH pumps ISO...

Page 9: ... Drehzahl Stand by rotation Vitesse de ratation stand by 1 min 60000 60000 60000 60000 Hochlaufzeit2 Run up time2 Temps d accélération2 min 2 2 3 3 Betriebsmittel Operating fluid Fluide moteur3 cm3 4 4 4 4 füllung3 filling3 Kühlart Type of cooling Mode de refroidissement Konvektion Convection Convection serienmäßig standard standard Wassertemperatur Water temperature Température d l eau pour C 5 2...

Page 10: ...sure of turbomolecular pumps is the pressure attained in a test dome 48 hours after baking out TPH 055 The final pressure of the TPH 055 Turbo Pump is 1 10 6 mbar It is not possible to use metal seals in order to obtain lower final pressures because these turbo pumps are not equipped with CF F flanges TPH U 062 Depending on the backing pump system used the final pressure of the TPH U 062 Turbo Pum...

Page 11: ... N2 en fonction de la pression d aspiration p2 TPH TPU 062 avec bride DN 63 ISO K CF F et TPH 055 avec bride DN 63 ISO K 2 3 Encombrements Kühlwasseranschluß Hochvakuumanschluß Vorvakuumanschluß Flutanschluß Elektrischer Anschluß Luftkühlung Cooling water connection High vacuum connection Backing pump connection Venting connection Electrical connection Air cooling Raccord d eau de refroidissement ...

Page 12: ...hat the high vacuum flange can be loaded in vertical direction to a maximum of 20 kg The weight of an unsupported vacuum chamber must not exert any torque on the flange asymetric loading All UHV components should be assembled under absolutely clean conditions Unclean components increase the pumping down time as a result of the high desorption rate The pump can be flanged to the vacuum chamber in a...

Page 13: ...e pré alable voir paragraphe 9 accessoires D autres pièces sont énumérées dans le catalogue PFEIFFER Composants pour la technique du vide Une soupape de sûreté doit être montée dans la conduite de vide primaire afin d empêcher l entrée d air dans le récipient par le biais de la pompe à vide primaire voir paragraphe 9 accessoires Une soupape de sûreté de vide élevé est intégrée aux pompes à vide pr...

Page 14: ...cooling systems it must be taken in consideration that the oxygen content drops below the minimum quantity if no special measures are taken In this case it should be ensured that sufficient oxygen can be absorbed when the water is recooled The cooling water must always be filtered to keep the cooling circuit free from dirt and organic suspended matter Otherwise localized deposits may occur which m...

Page 15: ... the return system Cooling water supply with cooling unit Do not use a dirt trap 29 Install the TCW cooling water monitor 7 in the return system Accessories for cooling water connection see Section 9 Accessories Kühlwasserversorgung aus dem Netz Der Schmutzfänger 29 ist im Vorlauf und der Kühlwasserwächter 7 TCW im Rücklauf einzusetzen falls ver wendet Kühlwasserversorgung mit Kühlaggregat Keinen ...

Page 16: ...e unit the connections must be made in accordance with the wiring diagram in the operating instructions of the electronic drive unit For air cooling please se Section 9 Accessories 4 4 2 1 Installing the Air Cooling System Fig 11 Place the turbo pump on high vacuum flange 1 Take care of the sealing surface Unscrew rubber legs 21 see Fig 21 Screw on holder 12 in such a way that the screw on surface...

Page 17: ...g Valve can be used for delayed safety venting of the turbo pump and vacuum chamber If a TSF 010 Venting Valve is employed the turbo pump is vented immediately after a power failure or after the pump is switched off 4 5 Raccord de remise à l air Fig 12 TPH U 062 La pompe turbo TPH U 062 peut être remise à l air manuellement par le biais de la vis de fermeture standard G 1 8 située dans le raccord ...

Page 18: ... a delay if the following combinations are used 1 After stopping of the pump or a power failure the TSF 012 Venting Valve is supplied with power from the drive motor of the slowing down turbo pump Venting starts at approx 30 525 Hz of the rated rotation speed 2 Accessories Section 9 3 with TCS 304 4 not in connection with TCP 015 TPH 055 Die Turbopumpe TPH 055 hat keinen Flutanschluß Sie muß HV se...

Page 19: ...rew these to the turbo pump by means of the DN 10 ISO KF G 1 8 venting flange TVF Venting Valves or TSF Emergency Venting Valves with G 1 8 connection are screwed into the venting connection Screw the TTV Drier to a holder provided in advance Connect the hose between the venting valve and the drier Make the electrical connection in accordance with the applicable wiring diagrams in the respective o...

Page 20: ...leitungen der Antriebselektroniken sind alle Schaltpläne und Beschreibungen zum elektrischen Anschluß enthalten TPH U 062 Der elektrische Anschluß der Turbo pumpe erfolgt an der 19 poligen G Dose Die Verbindung zur TCP 121 380 wird mit dem 3m langen Verbindungskabel PM 011 232 X hergestellt andere Längen auf Anfrage Werden Schutzleiter Widerstände 0 1 Ω gefordert muß die Pumpe separat geerdet werd...

Page 21: ...ia contact K2 The reset function is activated by Disconnecting the mains voltage for a time 2 seconds e g by pressing the mains switch S1 Operating an externally connected reset pushbutton S3 for a time 2 seconds Please note If the reset function is activated via an external reset pushbutton the TCP must be supplied with power TPH 055 with TCP 015 When the TCP 015 detects a fault the motor power i...

Page 22: ...the heating up time of the rotor it should be at least 4 hours Heating jacket see accessories 5 3 Switching off Procedure Switch off the turbo pump on the electronic drive unit Close the vacuum safety valve in the fore vacuum line When PFEIFFER backing pumps are used the safety valve closes automatically when the backing pump is switched off TPH U 062 If a TCP 121 or 380 is used together with a TS...

Page 23: ...mp is not operated Close the high vacuum flange of the turbo pump and evacuate the pump via the fore vacuum flange Vent the turbo pump with dry air Close the fore vacuum connection Store the pump in vertical position on its rubber legs In rooms with a moist or aggressive atmosphere the turbo pump must be sealed in a plastic bag together with a bag of desiccant e g silicagel 5 4 Arrêt de la pompe t...

Page 24: ...e the complete operating fluid reservoir as follows Switch off the pump and vent it to atmospheric pressure If necessary remove the turbo pump from the system Unscrew the locking cover at the bottom Fig 13 Remove the operating fluid reservoir felt discs Fig 14 and dispose of it in accordance with the valid regulat ions Clean the pump and screw cap from dirt with a clean lint free cloth Insert a ne...

Page 25: ... Section 6 1 Place pump vertically high vacuum flange down in a suitable container Fill cleaning agent pure alcohol into the container until the fore vacuum flange of the pump is covered Important All regulations regarding the handling of solvents must be observed Allow the cleaning agent to work for about 5 10 minutes During this time slowly raise and lower the pump several times so that the stat...

Page 26: ... restes de produit de nettoyage Connect the pump with the high vacuum blank flange to a backing pump and evacuate to approx 10 1 mbar so that any cleaning agent residues are sucked away Do not switch on the turbo pump at this stage Vent the pump and fit new operating fluid reservoir Re fit pump into the system Please note Initial evacuation takes longer owing to the effect of cleaning agent residu...

Page 27: ...entraînement Widerstände Resistances Antriebes bei 20 C at 20 C à 20 C Résistances G F Hallsondenpfad Hall probe path Trajet de courant des sondes de Hall 100 Ω R 200 Ω L H Hallsondenausgang 1 Hall probe output 1 Sortie 1 des sondes de Hall ca 40 Ω 20 Ω 55 Ω J K Hallsondenausgang 2 Hall probe output 2 Sortie 2 des sondes de Hall ca 40 Ω 20 Ω 55 Ω F M Temperatursensoren Temperature sensors Capteurs...

Page 28: ...robe signal can be measured at the measuring and test adapter by means of an oscilloscope Point F 0 V ground 0 V and 5 V rectangular pulse signal between points F and G if necessary turn the rotor by hand ca 300 mV ss L H und and et J K 5 V G F Fig 16 TPH U 062 mit Hall Sonden Motor zweiphasig TPH U 062 with Hall probes Motor double phase TPH U 062 avec sondes de Hall moteur biphasè TPH U 062 TPH ...

Page 29: ... rose 4 grau grey gris 5 grün green vert 6 braun brown brun 7 weiß white blanc 8 rot red rouge Fig 19 Anschlußschema TPH U 062 1 Hallsensorschaltung Hallsonden oder Hall IC s mit Anpaßschaltung 2 bei Hall IC s Wiring diagram TPH U 062 1 Hall probe switching Hall probes or Hall ICs with interface 2 with Hall ICs Schéma de branchement TPH U 062 1 Circuit pour sondes de Hall Sondes de Hall ou CI Hall...

Page 30: ... matières toxiques la même indication est à apposer sur le bon de livraison et sur toute la correspondance afférente Les matières toxiques sont les matières et préparations suivant les prescriptions concernant les produits dangereux dans la version la plus récente En l absence des indications exempt de matières toxiques sur l appareil ou sur les documents d accompagnement PFEIFFER procédera automa...

Page 31: ...r unit in suitable protective foil Ship units only in appropriate transport containers Please Note Repair orders are carried out according to our general conditions of sale and supply If repairs are necessary please send the pump to your nearest PFEIFFER Service Center Contact Addresses And Telephone Hotline Contact addresses and telephone numbers can be found on the back cover of these operating ...

Page 32: ...30 Fig 21 49 47 44 43 34 35 50 38 27 ...

Page 33: ...Fan Ventilateur 115 V 50 60 Hz 1 PM 006 209 R 51 Lüfter Fan Ventilateur 230 V 50 60 Hz 1 PM 006 229 R 52 Schwingungsdämpfer Damper Amortisseur de vibrations 8 x 8 M3 3 P 3695 702 QE Fig 22 Ersatzteilliste Spare parts list Pièces de rechange Wasserkühlung water cooling refroidissement à l eau Fig 23 Pos Benennung Title Désignation Stück Nr Item Pieces Nr Pos Pièces No 46 USIT Ring USIT ring Joint e...

Page 34: ...3 Control Unit TCV 103 remise à l air et de 50 60 Hz pilotage vanne TCV 103 TPH U 062 Flutventil1 Venting valve1 Vanne de remise à l air1 Nach Druckabbau offen Open after pressure reduction Après suppression de G 1 8 PM Z01 082 TVF 012 TVF 012 la pression ouverte TVF 012 TPH U 062 Nach Druckabbau Closed after pressure Après suppression de la G 1 8 PM Z01 087 geschlossen reduction pression fermée T...

Page 35: ... X TPU TPU TPU DN 63 PM 006 801 X CU Dichtung 10Stck CU seal 10 pieces Joint CU 10 pièces DN 63 CF BN 845 037 T Dichtring Sealing ring Bague d étanchéité DN 63 ISO BP 213 195 T Überwurfflansch Collar flange Bride tournante DN 63 ISO BN 845 070 T Schraubensatz Set of screws Jeu de vis DN 63 CF BN 845 012 T 1 Nur in Verbindung mit TCF 103 oderTCV 103 1 Only in connection with TCF 103 or TCV 103 1 Se...

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