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11

Installation

Installation of ISO-K 
flange with ISO-K 
flange

For the installation of the flange connections the following components are avail-
able:

Î

Mind that the sealing surfaces are not damaged.

Î

Flange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.

Î

Use the required number of bracket screws.

Î

Tighten the bracket screws crosswise in three steps. 

Î

Tightening torque: 5, 15, 25 ±2 Nm

Installation of ISO-K 
flange with ISO-F 
flange

For the installation of the flange connections the following components are avail-
able:

Î

Mind that the sealing surfaces are not damaged.

Î

Flange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.

Î

Use 8 claw grips.

Î

Tighten the claw grips crosswise in three steps.

Î

Tightening torque: 3, 10, 16 ±1 Nm.

Installation of CF- 
flanges

NOTE

Possible damage to the pump

If a pump with an ISO-K flange is fastened to a vacuum chamber with an ISO-F flange 
or if ISO-KF flanges are used, sudden blocking of the rotor can result in twisting 
despite proper installation.

Connection nominal 
diameter

Designation

Pieces Ordering No. 

DN 100 ISO-K

Centering ring (coated)

1

PM 016 210-U

Centering ring (coated) with 
splinter shield

1

PM 016 211-U

Centering ring (coated) with 
protective screen

1

PM 016 212-U

Bracket screw

6

PF 300 110-T

Connection nominal 
diameter

Designation

Pieces Ordering No.

DN 100 ISO-K
DN 100 ISO-F

Centering ring (coated)

1

PM 016 210-U

Centering ring (coated) with 
splinter shield

1

PM 016 211-U

Centering ring (coated) with 
protective screen

1

PM 016 212-U

Claw grip

8

PF 301 100-T

NOTE

Preservation of sealing capacity

Observe the following to preserve sealing capacity:

Î

Touch seals only with gloves.

Î

Make sure sealing lips are undamaged.

Summary of Contents for TMH 261

Page 1: ...Betriebsanleitung Operating Instructions PM 0470 BE O 0709 Compact Turbo TurboDrag Pump TMH 261 TMU 261 Translation of the Original Operating Instructions...

Page 2: ...5 6 Connecting the remote control 17 5 7 Connections diagram TC 19 6 Operation 20 6 1 Operation modes 20 6 2 Commissioning 20 6 3 Function description 21 6 4 Monitoring of the operation conditions 24...

Page 3: ...ventions Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standar...

Page 4: ...t the diagrams High vacuum flange Fore vacuum flange Venting connection Cooling water connection Air cooling Electric connection Sealing gas connection Prohibition of an action or activity in connecti...

Page 5: ...ions up to protection class IP 30 Only operate the turbopump together with a water cooling unit or in ambient conditions up to protection class IP 54 after installing a specified TC cover plate NOTE D...

Page 6: ...riodically occurring forces The connection to a power supply with earthing of a direct voltage pole The use of accessories which are not named in this manual or not authorised by Pfeiffer Vacuum 3 Tra...

Page 7: ...e turbopumps TMH U 261 form a complete unit together with the electronic drive unit TC 600 For the voltage supply only Pfeiffer Vacuum power supplies may be used e g TPS oder DCU The use of other powe...

Page 8: ...vacuum flange 8 Electronic drive unit TC 600 17 Venting screw 20a Fore vacuum flange 98 Remote plug H F VV 4 17 20a 8 98 NOTE Observe the connection instructions On delivery turbopumps with TC 600 ar...

Page 9: ...All flange components must be grease free dust free and dry at installation The operating fluid reservoir is already installed and filled for the turbopumps TMH U 261 Use of a splinter shield or prot...

Page 10: ...ponents for installing the turbo pumps are special designs of Pfeiffer Vacuum Ob serve the minimum strength of 170 N mm2 for the flange material CAUTION Danger from the pump being ripped off When a P...

Page 11: ...se in three steps Tightening torque 3 10 16 1 Nm Installation of CF flanges NOTE Possible damage to the pump If a pump with an ISO K flange is fastened to a vacuum chamber with an ISO F flange or if I...

Page 12: ...and tigh ten circularly with a torque of 22 2 Nm After this check the torque since flo wing of the sealing material may make it necessary to tighten the screws Hexagon screw and through hole If used I...

Page 13: ...ximum gas load sealing gas must be used to ensure rotor cooling In case of increased backing pressure 0 1 mbar and or operation with gas loads either air or water cooling may be used Generally use wat...

Page 14: ...f corrosive or dusty processes The connection is made via a sealing gas valve Fig 6 Connecting the sealing gas valve Unscrew the screw plug with sealing ring out of the sealing gas connection of the t...

Page 15: ...g to the TC 600 with a screw and lock washer 8c 1 Connect the X2 plug on the 8a connection cable to the TPS 200 DCU 200 power supply pack at the X2 connection Fasten the X2 plug to the power supply wi...

Page 16: ...of a RS232 oder USB interface is possible via a TIC 001 or the USB RS485 converter NOTE Observe the connection instructions On delivery turbopumps with TC 600 are set up for operations with Remote Co...

Page 17: ...pump is started On delivery Pin 1 Pin 2 Pin 3 and Pin 4 are bridged in the remote plug Shielded cable must be used Connect the shielding on the plug side for the TC 600 to the TC housing Pin assignmen...

Page 18: ...tion acknow ledgement can be processed 6 Standby Standby off The turbopump is controlled to 66 of its nominal rotation speed 7 Rotation speed setting mode Rotation speed setting mode is off The rotati...

Page 19: ...MS 1 2 3 4 5 6 Relay box Heating Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas S...

Page 20: ...with a series of adapted accessories The installation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components For information...

Page 21: ...ents for operation with Pfeiffer Vacuum display and control units Operating instructions DCU Operating instructions HPU 001 Pumping operations with DCU Operation with re mote control Remote control op...

Page 22: ...gned a dual function see p 17 chap 5 6 Point 5 Re set Standby With the use of Standby the turbopump can be operated either at 66 of the nominal rotation speed Standby ON or at the nominal rotation spe...

Page 23: ...pump s capacity for each gas type Gas mode 0 factory setting for gases with the molecular mass 40 e g Ar Gas mode 1 for all lighter gases Fig 10 Gas mode power characteristic Settings are possible via...

Page 24: ...n the venting connection of the pump about one turn Venting with venting valve TVF 005 Enable venting via the functions of the electronic drive unit Settings are possible via the RS485 on the TC 600 b...

Page 25: ...nation carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances Decontaminate affected parts before carrying out maintenance work NOTE Disclaimer of...

Page 26: ...ntion to O ring Using tweezers lift out the lubricant reservoir Remove impurities from the turbopump and the end cover with a clean lint free cloth Do not use any cleaning fluids Push the new operatin...

Page 27: ...Remove impurities from the turbopump and the end cover with a clean lint free cloth Do not use any cleaning fluids Using tweezers insert new Porex rods 8 pieces Push the new operating fluid reservoir...

Page 28: ...is switched off the subsequently running turbopump delivers voltages 50 V eff There is a danger of electric shock when touching open contacts on conducting parts Never separate the electronic drive u...

Page 29: ...eiffer Vacuum Service clean the turbopump completely If necessary have the bearings replaced Take into account the total running time Change the operating fluid reservoir Installation and commissionin...

Page 30: ...ction Check gaskets and flange fasteners Eliminate leaks Gas load too high Reduce process gas feed Rotor runs hard defective bearing Check bearing for noise development Contact Pfeiffer Vacuum Service...

Page 31: ...Close the flange openings by using the original protective covers If possible send pump in the original packaging Contaminated vacuum pumps No units will be accepted if they are contaminated with mic...

Page 32: ...otes Pieces Order Qty 6 End cover M40 x 1 PM 003 619 A 1 7 Lubricant reservoir PM 063 265 T incl O ring 1 7 Lubricant reservoir Y PM 053 266 T incl 8 x Porex rod 7a O ring felt washer 1 8 Electronic d...

Page 33: ...g jacket safety plug 230 V PM 041 903 T PM 0542 BN Water cooling required Heating jacket UL plug 208 V PM 041 904 T Heating jacket UL plug 115 V PM 041 905 T Components for cooling Air cooling 24 V DC...

Page 34: ...gas throughputs at least 10 m3 h 10 m3 h Pumping speed for N2 210 l s 210 l s Pumping speed for He 220 l s 220 l s Pumping speed for H2 175 l s 175 l s Pumping speed for Ar 200 l s 200 l s Cooling me...

Page 35: ...ISO KF G1 8 M6 3 120 53 5 48 119 138 5 86 5 96 5 128 5 146 162 5 194 5 100 95 58 88 7 14 104 2 125 50 M8 30 60 45 67 113 5 82 3 3 M8 8 5 F F G G H VV VV DN 100 CF F DN 25 ISO KF M6 G1 8 3 3 M8 M8 50...

Page 36: ...atibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stanzel Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 A lar TMH 261 TMU 261 Guidelines harmonised stand...

Page 37: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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