9
11 12 13 14
15
16
17
Dismantling the membrane head
11 Allan head screw
12 Head cover
13 Valve plate
14 Sealing ring
15 Intermediate plate
16 Diaphragm
17 Washer
9
4
10a
1
1
11
20
10
2
7
5
1 Membrane head 1
2 Membrane head 2
4 Membrane head 4
5 Vacuum flange (direct screw
joint)
7 Exhaust (silencer)
9 Capacitor
10 Interhead connection 1-2
10a Interhead connection 2-3
11 Allan head screw
20 direct screw joint