Pfeiffer Vacuum HENA 101, Operating Instructions Manual

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14 Technical data and dimensions
14.1 General
Basis for the technical data of Pfeiffer Vacuum rotary vane pumps:
● Specifications according to PNEUROP committee PN5
● ISO 21360-1: 2016: “Vacuum technology - Standard methods for measuring vacuum-pump per-
formance - Part 1: General description”
● Leak test to ascertain the integral leakage rate according to EN 1779: 1999 technique A1; with
20 % helium concentration, 10 s measurement duration
● Sound pressure level according to ISO 3744, class 2
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1
1 · 10
-3 100 1 0.1 0.75
bar 1000 1
1 · 10 5
1000 100 750
Pa 0.01
1 · 10
-5 1 0.01
1 · 10
-3
7.5 · 10
-3
hPa 1
1 · 10 -3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10 -3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
Tbl. 14: Conversion table: Pressure units
mbar l/s Pa m 3 /s sccm Torr l/s atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m 3 /s
10 1 592 7.5 9.87
sccm 1.69 · 10 -2 1.69 · 10 -3 1 1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm
3
/s
1.01 0.101 59.8 0.76 1
Tbl. 15: Conversion table: Units for gas throughput
14.2 Technical data
Classification Hena 61 Hena 61 Hena 61 Hena 61
Part number PK D04 121 111 PK D04 121 112 PK D04 121 121 PK D04 121 122
Final pressure without gas ballast
≤ 5 · 10 -1 hPa ≤ 1.5 · 10 -1 hPa ≤ 5 · 10 -1 hPa ≤ 1.5 · 10 -1 hPa
Final pressure with gas ballast ≤ 1.5 hPa ≤ 1.5 hPa ≤ 1.5 hPa ≤ 1.5 hPa
Leak rate safety valve ≤ 8 · 10 -3 Pa m³/s ≤ 8 · 10 -3 Pa m³/s ≤ 8 · 10 -3 Pa m³/s ≤ 8 · 10 -3 Pa m³/s
Emission sound pressure level
without gas ballast at 60 Hz
≤ 67 dB(A) ≤ 67 dB(A) ≤ 67 dB(A) ≤ 67 dB(A)
Emission sound pressure level
without gas ballast at 50 Hz
≤ 64 dB(A) ≤ 64 dB(A) ≤ 64 dB(A) ≤ 64 dB(A)
Continuous inlet pressure, max. 800 hPa 800 hPa 800 hPa 800 hPa
Motor version 3-ph motor 3-ph motor 3-ph motor 3-ph motor
Rated power 50 Hz 2 kW 2 kW 2 kW 2 kW
Rated power 60 Hz 2.4 kW 2.4 kW 2.4 kW 2.4 kW
Cooling method Air Air Air Air
Nominal pumping speed at 50 Hz 63 m³/h 63 m³/h 63 m³/h 63 m³/h
Nominal pumping speed at 60 Hz 76 m³/h 76 m³/h 76 m³/h 76 m³/h
Rotation speed at 50 Hz 1500 rpm 1500 rpm 1500 rpm 1500 rpm
Rotation speed at 60 Hz 1800 rpm 1800 rpm 1800 rpm 1800 rpm
Technical data and dimensions
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