8
4.3
Nitrogen Flow/Purity Charts
Purity 80 psig (5.5 bar) 90 psig (6.2 bar) 100 psig (6.9 bar) 110 psig (7.6 bar) 120 psig (8.3bar)
(%N
2
)
Meter Reading Meter Reading Meter Reading Meter Reading Meter Reading
99.5
1.7
2
2.3
2.7
3.0
99.0
3.2
3.8
4.3
4.7
5.1
98.0
5.6
6.2
6.8
7.2
7.6
97.0
7.4
8.2
8.9
9.0
96.0
9.1
9.6
Table: 3
Purity 80 psig (5.5 bar) 90 psig (6.2 bar) 100 psig (6.9 bar) 110 psig (7.6 bar) 120 psig (8.3bar)
(%N2)
Flow rate
Flow rate Flow rate
Flow rate
Flow rate
99.5
100 SLPM
120 SLPM
140 SLPM
157 SLPM
170 SLPM
99.0
155 SLPM
185 SLPM
210 SLPM
235 SLPM
260 SLPM
98.0
240 SLPM
280 SLPM
320 SLPM
355 SLPM
390 SLPM
97.0
320 SLPM
375 SLPM
415 SLPM
455 SLPM
96.0
395 SLPM
455 SLPM
Table: 4
Purity 80 psig (5.5 bar) 90 psig (6.2 bar) 100 psig (6.9 bar) 110 psig (7.6 bar) 120 psig (8.3bar)
(%N2)
Air
Consumption
Air Consumption Air Consumption Air Consumption Air Consumption
99.5
27 SCFM
31 SCFM
35 SCFM
39 SCFM
42 SCFM
99.0
29 SCFM
33 SCFM
37 SCFM
42 SCFM
46 SCFM
98.0
32 SCFM
37 SCFM
43 SCFM
47 SCFM
52 SCFM
97.0
35 SCFM
41 SCFM
46 SCFM
51 SCFM
96.0
39 SCFM
43 SCFM
Table: 5
4.4
Pressure Application Adjustments
Use the following procedure for start-up and adjustment of the system. (
Note:
In elevated
pressure applications, the customer should install a flow controller downstream from the
application, as detailed in the Installation section of this manual.)
a.
Open the (customer installed) inlet air gate valve.
b.
Adjust the (customer installed) inlet air pressure regulator until the Operating Pressure
gage (see figure 1) shows the pressure required to deliver nitrogen at the desired flow
rate (per Tables 3 and 4.)
c.
Turn the flow control valve to its fully open position.