Table 3:
Installation Information
1. SITE PREPARATION
• When working with components that contact process or purge gases
(for example, gasket-seal connection gaskets) always wear new, clean
latex gloves to prevent fingerprint contamination.
• Inspect all gasket-seal connector sealing surfaces for dirt, scratches,
dents, pitting, or corrosion before assembly. Clean or replace affected
connectors before assembly.
• Perform helium leak test on all affected process gas connections to
ensure system is leak free prior to installing purifier. A spool piece with
appropriate end connections can be used in place of the purifier for this
test. If the leak test is failed, locate and repair the leak and repeat the
test. Leak testing procedures are documented in SEMI F1, ASTM E
498, or ASTM E 499.
• Prior to installing purifier, purge all tubing, fittings, and components in
the installation zone with inert gas (nitrogen or argon).
Product:
Minimum Purge
Tools Required for Installation:
Gas Flow Rate:
PG550
2 slpm (4.2 scfh)
.625" and .75" open-end wrenches
PG550-MAN
2 slpm (4.2 scfh)
.625" and .75" open-end wrenches
PG2400 (VMM4)
5 slpm (10.6 scfh)
Two .75" open-end wrenches
PG2400 (VMM8)
10 slpm (21.2 scfh)
0.9375" and 1.0625" open-end wrenches
PG2400-MAN
10 slpm (21.2 scfh)
0.9375" and 1.0625" open-end wrenches
PG11000
10 slpm (21.2 scfh)
0.9375" and 1.0625" open-end wrenches
PG11000-MAN
10 slpm (21.2 scfh)
0.9375" and 1.0625" open-end wrenches
