Ossila FOUR-POINT PROBE, User Manual

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Four-Point Probe System User Manual
Ossila.com 10 Ossila Limited © 2022
6. Specifications
The Four-Point Probe System measurement specifications are shown in Table 6.1 and Table 6.2 ,
and the physical specifications are shown in Table 6.3 .
Table 6.1. Four-Point Probe System measurement specifications.
Voltage range ± 100 μV to ±10 V
Current range ±10 nA to ±200 mA
Sheet resistance range 100 mΩ/ square to 10 MΩ/ square
Table 6.2. Accuracy and precision of the Four-Point Probe System at each resistance range. Accuracy is the
maximum deviation from the true value. Precision is the maximum deviation between identical
measurements (useful for comparative measurements).
Sheet Resistance Accuracy Precision Measured at Range
100 mΩ/ square ±8% ±3% 200 mA
1 Ω/ square ±2% ±0.5% 200 mA
10 Ω/ square ±1% ±0.5% 200 mA
100 Ω/ square ±1% ±0.05% 20 mA
1 kΩ/ square ±1% ±0.03% 20 mA
10 kΩ/ square ±1% ±0.02% 2 mA
100 kΩ/ square ±2% ±0.05% 200 μA
1 MΩ/ square ±8% ±0.5% 20 μA
10 MΩ/ square ±30% ±5% 20 μA
Table 6.3. Four-Point Probe System physical specifications.
Probe Spacing 1.27 mm
Rectangular Sample
Size Range Long Edge Minimum: 4 mm
Short Edge Maximum: 60 mm
Circular Sample Size
Range (Diameter) 4 mm to 76.2 mm
Maximum Sample
Thickness 10 mm
Overall Dimensions Width: 145 mm
Height: 150 mm
Depth: 240 mm