ZS family series
Displacement / measurement sensors
3
ZS-L-series Sensor Heads
ZS-HL-series Sensor Heads
Item
Model
ZS-LD50
ZS-LD50S
ZS-LD80
ZS-LD130
ZS-LD200
ZS-LD350S
Applicable Controllers
ZS-HLDC/LDC series
Optical system
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Measuring center distance
50 mm
47 mm
50 mm
47 mm
80 mm
78 mm
130 mm
130 mm
200 mm
200 mm
350 mm
Measuring range
±5 mm
±4 mm
±5 mm
±4 mm
±15 mm
±14 mm
±15 mm
±12 mm
±50 mm
±48 mm
±135 mm
Light source
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape
Line beam
Spot beam
Line beam
Line beam
Line beam
Spot beam
Beam diameter
*1
*1
Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
900 x 60 µm
50 µm dia.
900 x 60 µm
600 x 70 µm
900 x 100 µm
240 µm dia.
Linearity
*2
±0.1%F.S.
*2
This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S
regular reflection mode. Linearity may change according to the workpiece.
±0.1%F.S.
±0.25%
F.S.
±0.1%
F.S.
±0.25%
F.S.
±0.1%F.S.
Resolution
*3
*3
This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the
ZS-LD50/LD50S regular reflection mode.
0.8 µm
0.8 µm
2 µm
3 µm
5 µm
20 µm
Temperature characteristic
*4
*4
This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
0.02% FS/°C
0.02% FS/
°
C
0.01% FS/
°
C
0.02% FS/
°
C
0.02% FS/
°
C
0.04% FS/
°
C
Sampling cycle
*5
*5
This value is obtained when the measuring mode is set to the high-speed mode.
110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR indica
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less
(incandescent light)
Illumination on re-
ceived light surface:
2000 lx or less
(incandescent light)
Illumination on received light surface:
3000 lx or less (incandescent light)
Ambient temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Degree of protection
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials
Case: Aluminum die-cast, Front cover: Glass
Cable length
0.5 m, 2 m
Weight
Approx. 350g
Accessories
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet
Item
Model
ZS-HLDS2T
ZS-HLDS5T
ZS-HLDS10
Applicable Controllers
ZS-HLDC series
Optical system
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Measuring center distance
20 mm
5.2 mm
44 mm
50 mm
94 mm
100 mm
Measuring range
±1 mm
±1 mm
±4 mm
±5 mm
±16 mm
±20 mm
Light source
Visible semiconductor laser
(wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape
Line beam
Beam diameter
*1
*1
Defined as 1/e
2
(13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
1.0 mm x 20 µm
1.0 mm x 30 µm
3.5 mm x 60 µm
Linearity
*2
*2
This is the error in the measured value with respect to an ideal straight line. Linearity may change according to the workpiece. The following options are available.
±0.05%F.S.
±0.1%F.S.
Resolution
*3
0.25 µm (No. of samples to average: 256) 0.25 µm (No. of samples to average: 512) 1 µm (No. of samples to average: 64)
Temperature characteristic
*4
0.01%F.S./°C
Sampling cycle
110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 µs (High-precision Mode), 4.4 µs (High-sensitivity Mode)
LED
Indicators
NEAR indica
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Degree of protection
IP64
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials
Case: Aluminum die-cast, Front cover: Glass
Cable length
0.5 m, 2 m
Weight
Approx. 350 g
Approx. 600 g
Accessories
Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
Model
Diffuse reflection
Regular reflection
ZS-HLDS2T
SUS block
Glass
ZS-HLDS5T/HLDS10
White aluminum ceramic
Glass
ZS-HLDS60/HLDS150
White aluminum ceramic
---
ZS family series
Displacement / measurement sensors
4
ZS-HL/L-series Sensor Controllers
*3
This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to within the graph. The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.
*4
This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
ItemModel
ZS-HLDC11/LDC11
ZS-HLDC41/LDC41
No. of samples to average
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted Sensors
1 per Sensor Controller
External interface
Connection method
Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
Serial I/O
USB 2.0
1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C
1 port, 115,200 bps max.
Output
Judgment output
HIGH/PASS/LOW 3 outputs
NPN open collector, 30 VDC, 50 mA max., residual
voltage 1.2 V max.
HIGH/PASS/LOW: 3 outputs
PNP open collector, 50 mA max., residual voltage
1.2 V max.
Linear output
Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).
• Voltage output: .10 to 10 V, output impedance: 40
Ω
• Current output: 4 to 20 mA, maximum load resistance: 300
Ω
Inputs
Laser OFF, ZERO
reset timing, RESET
ON: Short-circuited with 0 V terminal or 1.5 V or less
OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited to supply voltage or within 1.5 V
of supply voltage.
OFF: Open (leakage current: 0.1 mA max.)
Functions
Display:
Measured value, threshold value, voltage/current, received light amount,
and resolution/terminal block output
*1
Sensing:
Mode, gain, measurement object, head installation
Measurement point
*2
:
Average, peak, bottom, thickness, step, and calculations
Filter:
Smooth, average, and differentiation
Outputs:
Scaling, various hold values, and zero reset
I/O settings:
Linear (focus/correction), judgments (hysteresis and timer),
non-measurement, and bank (switching and clear) *2
System:
Save, initialization, measurement information display, communications
settings, key lock, language, and data load
Task:
ZS-HLDC
@
1: Single task or multitask (up to 4)
ZS-LDC
@
1: Single task
*1
Terminal block output is a function of the ZS-HLDC
@
1.
*2
Can be used with ZS-HLDC
@
1 when Multitask Mode selected.
Status indicators
HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (green), and ENABLE (green)
Segment display
Main digital
8-segment red LED, 6 digits
Sub-digital
8-segment green LEDs, 6 digits
LCD
16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix
Setting inputs
Setting keys
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage
21.6 V to 26.4 VDC (including ripple)
Current consumption
0.5 A max. (when Sensor Head is connected)
Ambient temperature
Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Degree of protection
IP 20
Weight
Approx. 280 g (excluding packing materials and accessories)
Accessories
Ferrite core (1), instruction sheet
Model
Diffuse reflection
Regular reflection
ZS-HLDS2T
SUS block
Glass
ZS-HLDS5T
White aluminum ceramic
ZS-HLDS10/HLDS60/
HLDS150
White aluminum ceramic
Displacement / measurement sensors
15
Displacement/measurement sensors - Cat.-No. Q18E-EN-01
