R
2
Silicon Wafer Mapping Sensor
F3M-S
Allows Simultaneous Mapping of up
to 25 Silicon Wafers
H
Economical, one sensor detects most
wafer types, including dummy wafers
H
Models match wafer sizes of 300 mm,
200 mm and 150 mm
H
Automatic and remote teaching
capability
H
Self-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size
Number of cassette slots
Function
Remarks
Part number
6 inches (4.76-mm pitch)
25
Self-diagnosis
---
F3M-S625
6 inches (4.76 mm pitch)
26
---
---
F3M-S626
8 inches (6.35-mm pitch)
25
Self-diagnosis
---
F3M-S825
8 inches (6.35 mm pitch)
26
---
---
F3M-S826
12 inches (10-mm pitch)
13
Self-diagnosis
CE marking
F3M-S1213
12 inches (10 mm pitch)
25
Self-diagnosis
CE marking
F3M-S1225
Application Examples
Detects Transparent Glass Wafers
with a Transparency of 92%
(F3M-S6
j
and F3M-S8
j
)
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. The F3M-S also accurately
detects dummy wafers in the carrier used to test coating or
processing tolerances.
Automatic Teaching Saves Setting Time
Remote Teaching Available
The F3M-S has an automatic teaching function that ensures easy
adjustments within a minimal time. The remote teaching function
allows quick, on-the-fly set up.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Note: The self-diagnostic output function is not incorporated by
the F3M-S826/-S626.
Static Electricity Protection
OMRON’s optical system, including an emitter and receiver,
prevents Sensor malfunction and damage by protecting the
Sensor from static electricity that may be charged on
semiconductor wafers at the time of mapping.
