H301-LUDL 96A602
User Manual
Rev 03
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ge
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11.
Connection of the Chamber with Z piezo stage
H301-LUDL 96A602 fits on the Z piezo Stage without any screws. To fix the chamber on the stage, follow the steps
shown in Figure 21.
1.
Place the chamber on the stage (See Image 1 of Figure 21).
2.
Incline the chamber and slide it in direction of the springs until it snaps into the housing. (See Image 2 of Figure
3.
Image 3 of Figure 21 shows the chamber fitted on the Z piezo Stage.
Spring
1
2
3
Figure 21. Connection of the Chamber with
Z piezo Stage
