10
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
1.3
Technical Data
Model
SC 5 D
SC 15 D
SC 30 D
SC 60 D
50 Hz
60 Hz
50 Hz
60 Hz
50 Hz
60 Hz
50 Hz
60 Hz
Displacement
l · min
-1
90
108
250
300
500
600
1000
1200
(swept volume)
m
3
· h
-1
5
6,48
15
18
30
36
60
72
cfm
3.1
3.8
8.8
10.6
17.6
21.2
35.3
42.3
Pumping speed
1
l · min
-1
80
93
210
230
420
500
880
1020
m
3
· h
-1
4,8
6,2
13,6
16,4
26,3
31,5
52
62
cfm
2.8
3.6
8
9.6
15.4
18.5
31.0
36.0
Ultimate pressure
Pa
#
5
#
1.6
#
1.0
#
1.0
mbar
#
0.05
#
0.016
#
0.01
#
0.01
Torr
#
0.037
#
0.012
#
0.0075
#
0.0075
Leak rate
3
mbar · l · s
-1
1.0 · 10
-6
1.0 · 10
-6
1.0 · 10
-6
1.0 · 10
-4
Max. inlet pressure
Atmospheric pressure
Ambient operating
°C
5 - 40
5 - 40
5 - 40
5 - 40
temperature range
Gas temperature at inlet
°C
max. 50
max. 50
max. 50
max. 50
Inlet connection
DN
25
25
40
40
Exhaust connection
DN
16
16
25
40
Cooling
Air cooling
Protection class
IP
20
20
20
20
Class of equipment
Class 1
Miscellaneous
With operating hours counter und
purge gas connection
Water vapour tolerance
g/day
5
25
25
25
at 25 °C, humidity 60 %,
with opened purge gas
4
l · min
-1
9
10
10
10
