Oerlikon RUVAC WA, Installation And Operating Instructions Manual

Page: 31 / 72

Description
31 GA03107_002_A4 - 09/2015 - © Oerlikon Leybold Vacuum
a
a
1
a
2
a
5
a
4
a
3
h
7
h
1
b
7
b
b
1
b
2
b
6
h
h
2
b
6
b
5
b
4
b
3
h
3
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b
8
DN
DN
DN
DN
d b
9 b
9
Typ b b
1
b
2
b
3
b
4
b
5
b
6
b
7
1) b
8
1)
WA/WAU 251 250 270 210 280 230 170 24 305 285
WA/WAU 501 310 299 229 320 271 201 24 390 313
WA/WAU 501H 310 299 229 320 271 201 24 414 330
WA/WAU 1001 376 352 278 370 320 246 24 494 366
WA/WAU 1001H 376 352 278 370 320 246 24 524 398
WA/WAU 2001 463 518 388 460 422 292 24 638 456
WA/WAU 2001H 463 518 388 460 422 292 24 642 460
Typ DN DN
1
a a
1
a
2
a
3
a
4
a
5
a
6
WA/WAU 251 65 63 ISO-K 732 405 365 14 209 120 194
WA/WAU 501 65 63 ISO-K 830 486 450 14 237 155 218
WA/WAU 501H 65 63 ISO-K 830 486 450 14 237 155 218
WA/WAU 1001 100 100 ISO-K 1058 560 520 16,5 298 180 262
WA/WAU 1001H 100 100 ISO-K 1058 560 520 16,5 298 180 262
WA/WAU 2001 150 160 ISO-K 1236 800 740 18 367 220 310
WA/WAU 2001H 150 160 ISO-K 1236 800 740 18 367 220 310
Typ b
9
d h h
1
h
2
h
3
h
4
h
5
1) h
6
h 1)
WA/WAU 251 7.5 50 300 160 280 180 306 360 330 307
WA/WAU 501 7.5 50 340 180 320 194 348 430 370 332
WA/WAU 501H 7.5 50 340 180 320 194 348 450 370 350
WA/WAU 1001 7.5 50 396 211 370 227 414 532 425 392
WA/WAU 1001H 7.5 50 396 211 370 227 414 564 425 424
WA/WAU 2001 7.5 50 530 300 460 348 578 753 541 523
WA/WAU 2001H 7.5 50 530 300 460 348 578 760 541 530
1) For RUVAC WAU only
Outside dime/- 3 mm
DN = ND 6 pump flange in accordance with DIN 2501
DN1 = Collar flange with gasket for connecting ISO-K standard components
Fig. 1.5 Dimensional drawing for the RUVAC WA/WAU pumps
Fig. 1.7 Power consumption of the RUVAC WA/WAU
10
-3
10
-1
10
-2
10
0
10
1
10
2
10
3
10
2
2
4
6
8
10
1
10
3
10
4
mbar
Pressure
m
3
h
-1
Pumping speed
WAU 1001+SV 300
WAU 501 +SV 200
WAU 2001+SV 630F
x
cfm
10
50
5000
1000
500
100
Torr
1 0 -1 -2 -3
10
10 10 10 10 750
Total pressure
Partial pressure
10
-5
2 4 68
10
-4
-4 -5
10 10
WAU 251 +D 65 B
Fig. 1.6 Pumping speed of the RUVAC WA/WAU, 50 Hz