OAI 200 Series, Operation Manual

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Table of Contents
Section 1: Introduction ..................................................................................3
Scope .......................................................................................................3
Certification ..............................................................................................3
Warranty and Assistance..........................................................................3
Return Policy ............................................................................................4
Unpacking and Inspection ........................................................................4
Section 2: Components of the Series 200 ...................................................5
Introduction...............................................................................................5
The Alignment Module..............................................................................5
The Exposure System ..............................................................................6
The Light Sources ...............................................................................6
The Regulated, Power-adjustable Power Supply ................................6
The Constant Intensity Controller ........................................................6
Shutter Timer/Field Illumination Control ..............................................6
Alignment Optics ......................................................................................7
Operating controls ....................................................................................7
Section 3: Installation Instructions ..............................................................8
Alignment Module.....................................................................................8
Light Source .............................................................................................8
Installing the microscope ..........................................................................9
Installing the Constant Intensity Controller ...............................................9
Preparing the Console..............................................................................9
Section 4: Operating Instructions ..............................................................10
Controls and Indicators...........................................................................10
Installing the Photomask ........................................................................10
Placing the Substrate on the Vacuum Chuck and Alignment .................10
Exposing the Substrate ..........................................................................12
Section 5: Aligning the Microscope to the Alignment Module ................13
Aligning the Microscope to the Alignment Module ..................................13
Section 6: Trouble Shooting .......................................................................14
Series 200 Specifications ............................................................................15
Model 200 Figures ........................................................................................17
Figure 1. Electrical Interconnection Diagram
Figure 2. Rear Panel Connections
Figure 3. Controls and Indicators
Section 7: Drawings/Schmatics ..................................................................19