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SECTION 4:
OPERATING INSTRUCTIONS
Controls and Indicators
The controls and indicators are shown and their functions are described in Figure 3.
Installing the Photomask
1.
Close the mask frame with the switch at the front of the alignment module.
2.
With the chrome side facing down, place the photomask on the mask plate using
the alignment pins to properly locate the mask.
3. Turn
the
Mask Vac.
ON.
4.
Place the mask clamps over the photomask and secure.
5.
Rotate the mask plate so that the x-axis of the mask corresponds the x-axis of the
microscope's movement. This procedure will greatly facilitate the location of
alignment structures on the mask.
6.
Open the mask frame. The substrate may now be placed on the substrate holder
assembly (vacuum chuck.)
Placing the Substrate on the Vacuum Chuck and Alignment
1.
Place the substrate on the vacuum chuck using the alignment pins (if provided) to
orient the substrate and turn the
Sub. Vac.
Switch ON.
2.
Close the mask frame.
3.
Place the Align Optics over the mask by releasing the vacuum hold and moving it
forward. Using the small X-Y stage for the final alignment. Then focus the
microscope on the mask alignment structure.
4.
Using the Z motion knob located on the right front-side of the alignment module,
raise the substrate (by smoothly rotating the Z Knob) until it is in focus but not touching the
mask. (NOTE: Use low magnification for set-up and for locating the alignment structures
because low magnification provides the greatest depth of focus and widest field of view.)
Summary of Contents for 200 Series
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