background image

                                                                                                                                              

v

                                                                     

EDH0222En2010 — 10/19

GTS-V                                                                                          High Precision Vertical Linear Stages

 

 

 

 

 

 

              Document Number: MKS-CR-1197 

A

 

 

 

 

 

 

Revision: C 

 

EU Declaration of Conformity 

 

Application of Council Directive(s):

 2014/30/EU 

Electromagnetic Compatibility Directive (EMCD) 

 

 

 

 

 2014/35/EU   Low Voltage Directive (LVD) 

 

 

 

 

 2014/68/EU   European Pressure Equipment Directive (PED) 

 

 

 

 

 2006/42/EC   Machinery Directive (MD) 

 

 

 

 

 2011/65/EU   Restriction of Hazardous Substances Directive (RoHS) 

 

Standard(s) to which conformity is declared:  

EN 61326-1:2013 (EMC); 

EN 61326-2-3:2013 (EMC);  

 

EN 61010-1:2010 (Safety); 

 

EN 60825-1 (Safety of Laser Products – Part 1); 2014 

 

PED Module SEP (Sound Engineering Practices); 2014 

Emissions: 

CISPR 11:2015 

Industrial, Scientific and Medical Equipment Radio-Frequency Disturbance Characteristics - Limits and Methods of                                                

Measurement

  

IEC 61000-3-2:2014 EMC/Limits for Harmonic Current Emission

 (1) 

IEC 61000-3-3:2013 EMC/Limitations of Voltage Fluctuations and Flicker in Low-Voltage Supply Systems

 (2) 

IEC 61000-3-3:2013 EMC/Limitations of Voltage Fluctuations and Flicker in Low-Voltage Supply Systems

 (3) 

EN 55011:

 

2009+A1:2010 

(4) 

FCC 47 CFR Part 18: 2015

 

 

Immunity:  

IEC 61000-4-2:2008 EMC/Electrostatic Discharge Immunity Test  

IEC 61000-4-3:2006 2006+AMD1:2007+AMD2:2010 EMC/Radiated Radio - Frequency Electromagnetic Field Immunity Test 

IEC 61000-4-4:2012 EMC/Electrical Fast Transient/Burst Immunity Test 

IEC 61000-4-5:2014 EMC/Surge Immunity Test 

(3) 

IEC 61000-4-6:2013 EMC/Conducted Disturbances induced by Radio Frequency Fields Immunity Test 

IEC 61000-4-8:2009 EMC/Power Frequency Magnetic Field Immunity Test

 

IEC 61000-4-11:2004 EMC/Voltage Dips, Short Interruptions and Variations Immunity Test 

(5) 

IEC 61000-4-34:2005+AMD1:2009 EMC/Voltage Dips, Short Interruptions and Variations Immunity Test 

(5) 

 

Manufacturers Name:

  

MICRO-CONTROLE Spectra-Physics S.A.S 

 

 

 

Importer's Name & Location:  

/

 

 

 

 

 

 

 

 

 

 

Equipment Type/Description: 

GTS-V Series - High Precision Vertical Linear Stage

 

  

 

Model Number(s) 

(6)

GTS30-V; GTS70-V & GTS70-VCC

     

               

             

 

 

 

 

 

MKS confirms that, with respect to the products listed above, it believes it is in conformity with the selected European 

Union harmonization legislation. MKS product conforms to the above Directive(s) and Standard(s) only when installed in 

accordance with manufacturer’s specifications. This declaration has been issued under the sole responsibility of the 

manufacturer. 

 

Date: 

03/10/2019

 

 

 

 

 

 

 

 

 

 

 

 

Le Cointe Hervé 

 

 

 

Quality Director

  

1)

 

Applicable to AC powered product only. Class B 

2)

 

Applicable to AC powered product; DC powered connections must not connect to a D.C. distribution network; I/O Signal and Control Lines must be less than 30m and not exit the building. 

3)

 

Applicable to AC powered product; DC powered connections and may connect to a D.C. distribution network. 

4)

 

Class A, Group 2 

5)

 

Applicable to AC powered product only. 

6)

 

Compliance of the above model numbers requires the use of a braided shielded cable properly terminated at both ends – if so noted in the MKS Instruction Manual.

 

EC Declaration of Conformity

Summary of Contents for GTS-V Series

Page 1: ...High Precision Vertical Linear Stages GTS V USER S MANUAL G U ARANTE E D S P E CIFICATIO N S...

Page 2: ...her warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential...

Page 3: ...Specifications 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffness 4 3 5 Stage Weights 5 4 0 Drive and Motor 5 4 1 DC Servo Drive Version 5 4 2 Sensor Position 6 4 3 Feedbac...

Page 4: ...10 10 19 iv GTS V High Precision Vertical Linear Stages 8 0 Stage Installation 13 8 1 Unpacking 13 8 2 Mounting Patterns 13 9 0 Maintenance 14 9 1 Maintenance 14 9 2 Repair 14 9 3 Calibration 14 Servi...

Page 5: ...mmunity Test 3 IEC 61000 4 6 2013 EMC Conducted Disturbances induced by Radio Frequency Fields Immunity Test IEC 61000 4 8 2009 EMC Power Frequency Magnetic Field Immunity Test IEC 61000 4 11 2004 EMC...

Page 6: ...al safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a po...

Page 7: ...if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or...

Page 8: ...e 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may...

Page 9: ...s GTS V 1 0 Introduction This manual provides operating instructions for the GTS V precision vertical linear stage GTS70V GTS30V stages RECOMMENDATION We recommend you read carefully the chapter Conne...

Page 10: ...age migration a problem often found with other linear bearings especially in vertical arrangements A folded DC motor with a precision ground low friction lead screw arrangement delivers ultra smooth m...

Page 11: ...atability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approache...

Page 12: ...ncremental Motion m 0 1 0 25 0 1 Bi directional Repeatability m 0 1 0 5 0 2 Accuracy m 0 75 1 75 1 Maximum Speed mm s 10 5 2 10 Normal Load N 40 40 70 40 Straightness m 0 75 5 0 5 0 Pitch Roll rad 3 2...

Page 13: ...he above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower...

Page 14: ...in quadrature and sends to pins 19 20 23 and 24 of the SUB D25 connector Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to no...

Page 15: ...CTED T CONNECTED T SUB D25M CONNECTOR 1 2 3 4 5 6 7 8 14 22 21 16 19 23 20 24 15 25 17 18 13 SUB D25F CONNECTOR 1 2 3 4 5 6 7 8 14 22 21 16 19 23 20 24 15 25 17 18 13 0 6 MM2 WHITE 1 0 6 MM2 WHITE 2 0...

Page 16: ...an the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85...

Page 17: ...a SUB D25M connector for direct connection to Newport Controllers 5 4 MCAB 3 Cable CABLE CONNECTOR STAGE LOCKING KNOBS BENDING STATIC CABLE 1 50 38 CABLE IN MOTION 3 78 96 2 28 58 DISCONNECTED 39 10 S...

Page 18: ...non Newport controllers WARNING Newport guarantees compliance of GTS V stages only if used with Newport cables and controllers It is the customer s responsibility to modify the cable and take care of...

Page 19: ...stage 97 24 75 39 10 130 25 5 5 12 98 20 SQR 4 53 115 SQ 4 57 116 4 63 117 5 SQR 3 97 100 8 MANUAL KNOB 4 HOLES M6 THD ON SQR 3 97 100 8 DEPTH 39 10 4 HOLES M4 THD ON 2 95x 3 94 75x 100 DEPTH 31 8 5 H...

Page 20: ...ND MILLIMETERS SQR 5 35 136 SQR 5 35 136 2 95 75 3 94 100 SQR 3 97 100 8 155 70 0 6 30 2 56 20 67 17 39 10 4 HOLES 31 7 8 C BORED 47 12 3 58 91 2 95 75 2 95 75 SQR 3 97 100 8 3 94 100 8 HOLES M4 THD D...

Page 21: ...or safe transport It is recommended to carefully lift and remove the stage from packaging Packaging can be kept and used for possible maintenance return 8 2 Mounting Patterns GTSV stages use M6 and M4...

Page 22: ...e to Newport for re lubrication after 2000 hours of use If the GTS V stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instruction...

Page 23: ...Fax Name Company Address Country P O Number Item s Being Returned Model Description Reasons of return of goods please list any specific problems Return authorization Please obtain prior to return of i...

Page 24: ...sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois...

Reviews: