EDH0222En2010 — 10/19
2
GTS-V High Precision Vertical Linear Stages
2.0 —
Description
The GTS-V is the ideal foundation for applications that require long travel
vertical motion of horizontally oriented samples. Its low profile and high-
precision motion capabilities make this stage an excellent choice for
applications such as semiconductor wafer inspection, nanotechnology,
automated device alignment, metrology, and quality control processes.
When combined with our XM, GTS, VP, ILS, or IMS series of linear stages,
the GTS-V is a space-saving alternative to traditional XYZ stacks of stages,
and provides unobstructed access to the payload from any side.
Furthermore, centering the payload over the bearings, ensures less
cantilevering load effects and Abbe induced motion errors.
High-precision vertical motion is achieved using a direct vertical guiding
system composed of matched pairs of anti-creep crossed roller bearings
for GT30V and of recirculating ball bearings for GTS70V and GTS70VCC.
Compared to alternative wedged designs, this direct guiding method
provides consistently lower and more repeatable runout errors. Lastly, the
geared retainers prevent bearing cage migration, a problem often found
with other linear bearings, especially in vertical arrangements.
A folded DC motor with a precision ground, low friction lead screw
arrangement delivers ultra-smooth motion and does not back drive even at
high loads. A reduction belt between the motor and the lead screw
increases the available output torque, reduces the servo sensitivity and
when combined with a high resolution linear scale ensures 100 nm
minimum incremental motion with all Newport motion controllers and
drivers.
Precision position feedback is provided by an optical scale with 50 nm
resolution for GTS30V and GTS70V. This direct position feedback avoids
drive train errors impacting positioning performance, hence leading to
superior positioning accuracy and repeatability. For higher load
applications a rotary encoder is proposed with GTS70VCC.
2.1
Design Details
Base Material High-strength Aluminum
Bearings Anti-creep crossed roller bearings/Recirculating ball bearings
Drive Mechanism Precision ground lead screw, gravity preloaded nut
Drive Screw Pitch 1 mm
Feedback Linear steel scale, 20 µm signal period, 0.05 µm resolution, RS-422 differential output
or motor mounted rotary encoder in the CC version, 0.125 µm resolution
Limit Switches Optical
Origin Optical, located 5 mm from lower position travel limit
DriveType DC Servo
Cable Length 3 m (included)
