EDH0222En2010 — 10/19
4
GTS-V High Precision Vertical Linear Stages
3.2
Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 5 µm.
3.3
Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
3.4
Load Characteristics and Stiffness
CAUTION
Do not use the GTS-V stage for horizontal movement. Specifications are
given only for a vertical use (gravity preloaded).
G
U
AR
ANTE
E
D
S
P
E
CIFICATIO
N
S
GTS30V GTS70VCC GTS70V
Rotary Encoder Linear Encoder
Travel Range (mm)
(1)
30 70 70
Minimum Incremental Motion (µm) 0.1 0.25 0.1
Bi-directional Repeatability (µm) ±0.1 ±0.5 ±0.2
Accuracy (µm) ±0.75 ±1.75 ±1
Maximum Speed (mm/s) 10 5
(2)
10
Normal Load (N) 40 40/70 40
Straightness (µm) ±0.75 ±5.0 ±5.0
Pitch/Roll (µrad)
(3)
±25 ±80 ±80
MTBF (h) 20,000 hours at 25% load and with a 30% duty cycle
1)
GTS30V: -5 to+25mm
GTS70V: 0 to +70mm, when driven by ESP302 and XPS and -5 to +65 mm, when driven by SMC100CC
GTS70VCC: 0 to +70mm
2)
10 mm/s if used with 40 N payload
3)
To obtain arcsec units, divide µrad value by 4.8.
Max. Speed (mm/s) 10
Max. Acceleration (mm/s
2
) 40
GTS70V
GTS30V GTS70VCC
Cz, Normal centered load capacity (N) 40 40/70
K
a
x, Compliance in roll (µrad/Nm) 40 8
K
a
y, Compliance in pitch (µrad/Nm) 40 33
K
a
z, Compliance in yaw (µrad/Nm) 25 50
Qx Qy, Off-center load (N) Q
≤
Cz ÷ (1 + D/30)
Where D = Cantilever distance (mm) and Dmax = 100mm
k
α
z
k
α
x
k
α
y
X
Y
Z
Q
D
Cz
.51
(13)
.75
(19
)
