©Newport Corporation
MKS Spectra-Physics Confidential
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Utility Requirements
Water
The Spirit is a closed loop cooled system. If a water-to-water chiller model is ordered, utility
water services with a flow speed of 13 to 20 liters per minute (3.4 to 5.3 GPM) might be
required.
Power Requirements
HighQ-2
Controller
100 – 240 VAC, 50/60 Hz
Current: <2A
Spirit One
Power Supply
90 – 305VAC, 47 – 63 Hz
Current: <10A
Chiller
(HECR008)
100 – 240VAC, 50/60 Hz
Current: 10A
Spirit 4, Spirit 8, Spirit 16 (non-HE)
Controller/Chiller 100 – 230 VAC, 50/60 Hz
Current: <16A
Spirit 16HE, Spirit 30HE
Controller/Chiller 100 – 240 VAC, 50/60 Hz
Current: <14A
Spirit 70 and Spirit 100
Controller
208 – 230 VAC, 50/60 Hz, Single Phase (NEMA-6- 20 socket)
Current: <16A
Chiller
208 – 230 VAC, 50/60 Hz, Single Phase (NEMA-6- 20 socket)
Current: <16A