©Newport Corporation
MKS Spectra-Physics Confidential
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Maintenance Agreement
To maintain a valid warranty on your Spectra-Physics system, it is necessary for the
customer to assume the responsibility and perform the routine maintenance program.
Failure to do so may result in the warranty being voided.
Nalco Mixture
The Nalco Cleaner (P/N 1607-0547) is used to flush your system clean of ferrous metals
and copper alloys as a result of corrosion. It is recommended as a maintenance
procedure that the chiller/critical cooling loop in each piece of equipment is cleaned and
treated 1x per year. The laser does not have to be lasing. The cleaner should be
circulated for a minimum of 8 hours (the longer the better if time permits in order to
assure thorough cleaning).
Filters
ALPS filter
All models except HighQ-2 and Spirit One:
When the laser cavity humidity reaches an unacceptable level, the ALPS air purge filter
(P/N 90074765) should be replaced. This filter has an average lifetime 1.5 to two years,
depending on the relative humidity and the temperature of the operating environment.
All models except HighQ-2:
The Chiller’s filter screen should be inspected and cleaned every 3 months, or else
exchanged when it can no longer be rinsed clean. You should also monitor the laser
Chiller temperature to make sure cooling is within specifications.
If the laser is not going to be used for an extended period of time, turn off the laser and
drain the cooling solution.