MKS Newport HXP100-MECA, User Manual

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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Kinematic Positioning Systems
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity ...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction
.................................................................................1
2.0 — Description
...................................................................................2
3.0 — Characteristics
............................................................................3
3.1 Mechanical Specifications .......................................................................3
3.2 Guaranteed Specifications of the HXP100HA-MECA Version ..............4
3.3 Max. Cantilever Distance of the Load.....................................................4
3.4 Weight.........................................................................................................4
4.0 — Connection to the HXP100-ELEC
-D
or
HXP100HA-ELEC
-D
Controller
...
........................................5
4.1 Warnings on Controllers ..........................................................................5
4.2 Connection .................................................................................................6
4.3 Cables .........................................................................................................6
5.0 — Dimensions
...................................................................................8
6.0 — Maintenance
................................................................................9
6.1 Maintenance ..............................................................................................9
6.2 Repair .........................................................................................................9
Service Form .........................................................................................................11
A698J0 - EDH0239En1070 - 12/19