MKS HPS 903 Series, Operation And Maintenance Manual

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Cold Cathode Ionization Vacuum Sensor
Part # 1090300XX
__ __
Serial # __ __ __ __ __ __
Please fill in these numbers and
have them readily available when calling
for service or additional information.
(The part number can be found on
your packing slip, and both the part
number and serial number are located on
the bottom side of the housing.)
© 1999 MKS Instruments, Inc. HPS TM Products, Inc., All rights reserved.
ALCONOX is a registered trademark of Alconox, Inc.
IgniTorr is a trademark of MKS Instruments, Inc.
,
HPS
TM
Products, Inc.
Inconel is a registered trademark of Inco Alloys International, Inc.
Scotch-Brite is a trademark of 3M.
Is a registered trademark of MKS Instruments, Inc., HPS
TM Products, Inc.
For more information or literature, contact:
MKS Instruments, Inc., HPS
TM
Products, Inc.
5330 Sterling Drive
Boulder, CO 80301 USA
Phone: 303-449-9861
800-345-1967
FAX: 303-442-6880