MKS HPS 903 Series, Operation And Maintenance Manual

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4
Cold Cathode Ionization Vacuum Sensor
Design and/or specifications subject to change without notice.
Internal Operating Voltage 4 kV maximum
current limited to 133
m
A
Installation Orientation Any
Internal Volume 0.9 in. 3 (15.0 cm 3 ) maximum
Materials Exposed to Vacuum SS 304, SS 302, aluminum, glass,
Inconel
®
X-750, alumina ceramic
Display LED indicators for set point (red),
high voltage (yellow), and power
(green)
Electronic Casing ABS plastic, UL 94-5V flame rating
(with conductive coating)
Casing Dimensions 5" x 3" x 4.2"
(W x D x H) (127 mm x 76 mm x 108 mm)
Typical Weight (with CF Flange) 2.3 lb (1.04 kg)
Vacuum Connection KF 25
KF 40
2¾" CF (rotatable)
1" tubing
CE Certification EMC Directive
General Product Safety Directive