MKS HPS 903 Series, Operation And Maintenance Manual

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7 Cold Cathode Ionization Vacuum Sensor
About the HPS
TM
Products
Series 903 (IMT)
The Series 903 Inverted Magnetron Transducer (IMT) is a compact cold cathode
vacuum sensor with an integrated electronic control circuit.
The (IMT’s) simple modular design, high reliability,
and low cost make it especially attractive
to OEM equipment manufacturers. Its
sensor tube is available with one of four
standard vacuum interfaces.
The (IMT) is designed for applications
which require pressure
measurement in the
range from 5 x 10
-3
down to 3 x 10
-10
Torr.
Its rapid response and
wide measurement range
provide the equipment
designer with maximum
flexibility. Because it can
operate autonomously or
as part of a control
system, it is adaptable to
several roles, including that
of a monitor or an alarm.
The (IMT) is normally off and
requires shorting its High
Voltage Enable pin to ground
to turn it on. This allows the
(IMT) to be controlled by a
higher pressure sensor such
as the HPS TM Products
SensaVac Series 907 Analog
Convection Transducer (ACT).
For process control, the (IMT)
has one adjustable relay set
point. An LED indicates the status
of the set point.
The (IMT) can be located out of sight — pressure is then read from a
standard digital voltmeter or analog-to-digital converter and computer.