HPQ2-IP SP101009.102 – 10 October 2012
MKS Instruments, Spectra Products
10
1. Specification
General
Mass Range Capability
2 to 80 amu
Detector System
Faraday Cup
Maximum Recommended
Operating Pressure
1 x 10
-2
mBar
(8 x 10
-3
Torr)
Maximum Permissible
Operating Pressure
2 x 10
-2
mBar
(1.6 x 10
-2
Torr)
Minimum Detectable Partial
Pressure
1 x 10
-10
mBar
(8 x 10
-11
Torr)
Mass Stability
Better than
0.1 amu over 8
hours at constant ambient
temperature
Resolution
<1.2 amu at 10% peak height
Total shipping weight
6.0kg
Analyser
Maximum Bakeout
Temperature
250
0
C
Mounting Flange
2 ¾ inch Conflat (CF35)
Insertion Length
1.0 inch (25.4mm)
Ion Source Sensitivity
5 x 10-5 A/Torr
Electron Energy
40 and 70 eV nominal
(adjustable from PC)
Emission Current
0.1 and 0.7mA nominal
(adjustable from PC)
Filaments
2, independent, tungsten