MKS 902B, Operation And Installation Manual, Page: 45 / 58

902B Abs Piezo Operation manual 45
Analog output calibration = 31 (Varian Eysys)
Torr mbar Pascal V
out
1.00E-04 1.33E-04 1.33E-02 1
1.00E-03 1.33E-03 1.33E-01 2
1.00E-02 1.33E-02 1.33E+00 3
1.00E-01 1.33E-01 1.33E+01 4
1.00E+00 1.33E+00 1.33E+02 5
1.00E+01 1.33E+01 1.33E+03 6
1.00E+02 1.33E+02 1.33E+04 7
1.00E+03 1.33E+03 1.33E+05 8
Analog output calibration = 32 (Alcatel TA111)
Torr mbar Pascal V
out
1.50E-03 2.00E-03 2.00E-01 0.1
2.25E-03 3.00E-03 3.00E-01 0.2
3.00E-03 4.00E-03 4.00E-01 0.3
3.75E-03 5.00E-03 5.00E-01 0.4
4.50E-03 6.00E-03 6.00E-01 0.5
5.25E-03 7.00E-03 7.00E-01 0.6
6.00E-03 8.00E-03 8.00E-01 0.7
6.75E-03 9.00E-03 9.00E-01 0.8
7.50E-03 1.00E-02 1.00E+00 0.9
8.25E-03 1.10E-02 1.10E+00 1
1.50E-02 2.00E-02 2.00E+00 1.8
2.25E-02 3.00E-02 3.00E+00 2.5
3.00E-02 4.00E-02 4.00E+00 3.15
3.75E-02 5.00E-02 5.00E+00 3.65
4.50E-02 6.00E-02 6.00E+00 4.1
5.25E-02 7.00E-02 7.00E+00 4.5
6.00E-02 8.00E-02 8.00E+00 4.85
6.75E-02 9.00E-02 9.00E+00 5.15
7.50E-02 1.00E-01 1.00E+01 5.4
1.50E-01 2.00E-01 2.00E+01 6.95
2.25E-01 3.00E-01 3.00E+01 7.7
3.00E-01 4.00E-01 4.00E+01 8.1
3.75E-01 5.00E-01 5.00E+01 8.4
4.50E-01 6.00E-01 6.00E+01 8.6
5.25E-01 7.00E-01 7.00E+01 8.75
7.50E-01 1.00E+00 1.00E+02 9
1.50E+00 2.00E+00 2.00E+02 9.2
2.25E+00 3.00E+00 3.00E+02 9.2
Analog output calibration = 33 (MKS 685)
P = 10
(Vout – 4)
V
out
= 4 + log
10
(P)
Torr mbar Pascal V
out
1.00E-05 1.33E-05 1.33E-03 1.00
1.00E-04 1.33E-04 1.33E-02 1.00
1.00E-03 1.33E-03 1.33E-01 1.00
1.00E-02 1.33E-02 1.33 2.00
1.00E-01 1.33E-01 13.3 3.00
1.00 1.33 133.3 4.00
10.0 13.3 1333.2 5.00
100 133.3 1.33E+04 6.00
1000 1333.2 1.33E+05 7.00