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MKS 902B Operation And Installation Manual Download Page 35

 

902B Abs Piezo 

 

Operation manual

 

 

35 

  

Analog output calibration = 15 (Piezo analog output) 

 

 

Torr 

mbar 

Pascal 

V

out

 

-8.00E+2 

-1.07E+3 

-1.07E+5 

1.10 

-7.00E+2 

-9.33E+2 

-9.33E+4 

1.15 

-6.00E+2 

-8.00E+2 

-8.00E+4 

1.22 

-5.00E+2 

-6.67E+2 

-6.67E+4 

1.30 

-4.00E+2 

-5.33E+2 

-5.33E+4 

1.40 

-3.00E+2 

-4.00E+2 

-4.00E+4 

1.52 

-2.00E+2 

-2.67E+2 

-2.67E+4 

1.70 

-1.00E+2 

-1.33E+2 

-1.33E+4 

2.00 

-9.00E+1 

-1.20E+2 

-1.20E+4 

2.05 

-8.00E+1 

-1.07E+2 

-1.07E+4 

2.10 

-7.00E+1 

-9.33E+1 

-9.33E+3 

2.15 

-6.00E+1 

-8.00E+1 

-8.00E+3 

2.22 

-5.00E+1 

-6.67E+1 

-6.67E+3 

2.30 

-4.00E+1 

-5.33E+1 

-5.33E+3 

2.40 

-3.00E+1 

-4.00E+1 

-4.00E+3 

2.52 

-2.00E+1 

-2.67E+1 

-2.67E+3 

2.70 

-1.00E+1 

-1.33E+1 

-1.33E+3 

3.00 

-9.00E+0 

-1.20E+1 

-1.20E+3 

3.05 

-8.00E+0 

-1.07E+1 

-1.07E+3 

3.10 

-7.00E+0 

-9.33E+0 

-9.33E+2 

3.15 

-6.00E+0 

-8.00E+0 

-8.00E+2 

3.22 

-5.00E+0 

-6.67E+0 

-6.67E+2 

3.30 

-4.00E+0 

-5.33E+0 

-5.33E+2 

3.40 

-3.00E+0 

-4.00E+0 

-4.00E+2 

3.52 

-2.00E+0 

-2.67E+0 

-2.67E+2 

3.70 

-1.00E+0 

-1.33E+0 

-1.33E+2 

4.00 

-9.00E-1 

-1.20E+0 

-1.20E+2 

4.05 

-8.00E-1 

-1.07E+0 

-1.07E+2 

4.10 

-7.00E-1 

-9.33E-1 

-9.33E+1 

4.15 

-6.00E-1 

-8.00E-1 

-8.00E+1 

4.22 

-5.00E-1 

-6.67E-1 

-6.67E+1 

4.30 

-4.00E-1 

-5.33E-1 

-5.33E+1 

4.40 

-3.00E-1 

-4.00E-1 

-4.00E+1 

4.52 

-2.00E-1 

-2.67E-1 

-2.67E+1 

4.70 

-1.00E-1 

-1.33E-1 

-1.33E+1 

5.00 

1.00E-1 

1.33E-1 

1.33E+1 

5.00 

2.00E-1 

2.67E-1 

2.67E+1 

5.30 

3.00E-1 

4.00E-1 

4.00E+1 

5.48 

4.00E-1 

5.33E-1 

5.33E+1 

5.60 

5.00E-1 

6.67E-1 

6.67E+1 

5.70 

6.00E-1 

8.00E-1 

8.00E+1 

5.78 

7.00E-1 

9.33E-1 

9.33E+1 

5.85 

8.00E-1 

1.07E+0 

1.07E+2 

5.90 

9.00E-1 

1.20E+0 

1.20E+2 

5.95 

1.00E+0 

1.33E+0 

1.33E+2 

6.00 

2.00E+0 

2.67E+0 

2.67E+2 

6.30 

3.00E+0 

4.00E+0 

4.00E+2 

6.48 

4.00E+0 

5.33E+0 

5.33E+2 

6.60 

5.00E+0 

6.67E+0 

6.67E+2 

6.70 

6.00E+0 

8.00E+0 

8.00E+2 

6.78 

7.00E+0 

9.33E+0 

9.33E+2 

6.85 

8.00E+0 

1.07E+1 

1.07E+3 

6.90 

9.00E+0 

1.20E+1 

1.20E+3 

6.95 

1.00E+1 

1.33E+1 

1.33E+3 

7.00 

2.00E+1 

2.67E+1 

2.67E+3 

7.30 

3.00E+1 

4.00E+1 

4.00E+3 

7.48 

4.00E+1 

5.33E+1 

5.33E+3 

7.60 

5.00E+1 

6.67E+1 

6.67E+3 

7.70 

6.00E+1 

8.00E+1 

8.00E+3 

7.78 

7.00E+1 

9.33E+1 

9.33E+3 

7.85 

8.00E+1 

1.07E+2 

1.07E+4 

7.90 

9.00E+1 

1.20E+2 

1.20E+4 

7.95 

1.00E+2 

1.33E+2 

1.33E+4 

8.00 

2.00E+2 

2.67E+2 

2.67E+4 

8.30 

3.00E+2 

4.00E+2 

4.00E+4 

8.48 

4.00E+2 

5.33E+2 

5.33E+4 

8.60 

5.00E+2 

6.67E+2 

6.67E+4 

8.70 

6.00E+2 

8.00E+2 

8.00E+4 

8.78 

7.00E+2 

9.33E+2 

9.33E+4 

8.85 

8.00E+2 

1.07E+3 

1.07E+5 

8.90 

9.00E+2 

1.20E+3 

1.20E+5 

8.95 

1.00E+3 

1.33E+3 

1.33E+5 

9.00 

 

For positive pressure (V

out

>5 V) 

 

Piezo pressure = 10

(PZVout-6)

 

 

For negative pressure (V

out

<=5V): 

 

               -1 

Piezo pressure =   ——————      

           10

(PZVout-4)

 

 

Summary of Contents for 902B

Page 1: ...ion manual 1 902B Absolute Piezo Vacuum Pressure Transducer RS232 RS485 Display Operation and Installation Manual 902B Absolute Piezo Transducer Operation and Installation Manual MKS p n 100017633 Rev...

Page 2: ...rmal operation e If the product has been dropped or the enclosure has been damaged f When the product exhibits a distinct change in performance This indicates a need for service Service and Warranty S...

Page 3: ...ies of their respective owners No part of this work may be reproduced by any method including photocopying and recording or by any information or retrieval system without written permission of MKS Ins...

Page 4: ...rder to perform according to the specifications Output pins are not protected against wrong electrical connections Wrong electrical connections can cause permanent damage to the transducer or interfer...

Page 5: ...as 5 digits that identify flange communication interface analog output type I O connector and sensor sealing type Transducers can be delivered with customer configuration of various parameters like se...

Page 6: ...mechanical deflection of a stainless steel 316 membrane relative to an integrated reference vacuum The Piezo measures true absolute pressure independent of gas composition and concentration The senso...

Page 7: ...justment can be recovered using the FD ZER or FD SPN command See Factory default page 20 If the transducer is delivered with customer specified parameters the User Switch is disabled For enabling the...

Page 8: ...t measuring performance avoid large temperature gradients and direct cooling like air condition air stream or direct heating like a pump exhaust stream Bake out The transducer electronics can withstan...

Page 9: ...ace it Damage may occur to th e circuitry if excessive voltage is applied polarity reversed or if a wrong connection is made If using the analog voltage output connect the positive analog out and nega...

Page 10: ...elay 3 Normally Open 925 I O Connector 9 pin 9 pin male DSUB PIN Description 1 Relay Normally Open 2 Relay Normally Closed 3 Power 9 30 VDC 4 Power return 5 Analog Output 6 Relay Common 7 RS485 RS232...

Page 11: ...onment cable quality and communication speed but relative long cable spans up to 1 200m 4 000 ft is possible There are 2 wires other than ground that are used to transmit the digital RS485 signal The...

Page 12: ...the value the user enters into the command syntax Each query or command must begin with the attention character and end with the termination FF Command syntax for an information query device address...

Page 13: ...work and all transducers will transmit a reply Commands sent with address 255 will be executed by all transducers on the network but the transducers will not transmit replies For example use address 2...

Page 14: ...cts requires de energizing spike protection Inadequate protection can cause permanent damage to the transducer or interfere with the analog output signal Always ensure that inductive in rush currents...

Page 15: ...nd 253SH1 40 FF Reply 253ACK40 FF 4 Enable set point OFF ON Command 253EN1 ON FF Reply 253ACKON FF Setpoint setup by PDR900 Controller 1 Edit Setpoint Setpoint Value 1 Enter set point value 50 Torr 2...

Page 16: ...etpoint safety delay Command 253SPD ON FF Command values ON OFF Command reply 253ACKON FF Query 253SPD FF Query reply 253ACKON FF Factory default ON Integrated Touch Display For 902B transducer versio...

Page 17: ...ccessed via the Setpoint menu pressing the screen will lead back to the same menu If accessed via the quick access buttons on the Main screen pressing the screen will lead back to the Main screen Mode...

Page 18: ...or reading PR2 Absolute Piezo sensor reading PR3 Absolute Piezo sensor reading PR4 Absolute Piezo sensor reading scientific notation The analog output is per default based on the absolute Piezo readin...

Page 19: ...1 Torr Command 253ZER FF Command values None Command reply 253ACKZER FF Query 253ZER FF Query reply 253ACK0 FF Reset to default 253FD ZER FF Factory default Factory adjustment value Sensor value too h...

Page 20: ...ble EN1 OFF Setpoint safety delay SPD ON Switch enable SW ON Analog out 1 AO1 235 1 Analog out 2 AO2 10 1 If the transducer is delivered with other analog output than standard mks part number specifie...

Page 21: ...cer locked If the transducer is delivered with special configuration the lock function will only be temporarily disabled and will be enabled again after cycling power cycle or executing the enable loc...

Page 22: ...KMKS FF Model MD Specifies transducer model number Query 253MD FF Query reply 253ACK902B FF Part Number PN Specifies transducer part number Query 253PN FF Query reply 253ACK902B 11030 FF Serial Number...

Page 23: ...lange Interface Analog out Connector Relays Enclosure sealing 902B 1 1 0 2 0 0 0 10 V Linear 10 mV Torr mbar 1 0 5 V Linear 5 mV Torr mbar 2 2 10 V LOG10 3 1 5 V LOG5 4 1 V decade 5 0 10 V 100 mV Torr...

Page 24: ...essure value assignment Second digit y 0 MKS Standard 1 VDC decade 1 Edwards APG L 1 99 10 VDC 2 Edwards APG100 3 Edwards WRG 4 Inficon PSG500 Oerlikon Leybold TTR91 5 Inficon MPG400 Pfeiffer PKR251 6...

Page 25: ...MKS standard output This feature is a hardware option and must be specially ordered Refer to part number specifications page 3 The secondary analog output provides 12 bit resolution Command 253AO2 15...

Page 26: ...0 6 65E 02 0 0250 6 00E 00 7 98E 00 7 98E 02 0 0300 7 00E 00 9 31E 00 9 31E 02 0 0350 8 00E 00 1 06E 01 1 06E 03 0 0400 9 00E 00 1 20E 01 1 20E 03 0 0450 1 00E 01 1 33E 01 1 33E 03 0 0500 2 00E 01 2 6...

Page 27: ...00 6 65E 02 5 3979 6 00E 00 7 98E 00 7 98E 02 5 5563 7 00E 00 9 31E 00 9 31E 02 5 6902 8 00E 00 1 06E 01 1 06E 03 5 8062 9 00E 00 1 20E 01 1 20E 03 5 9085 1 00E 01 1 33E 01 1 33E 03 6 0000 2 00E 01 2...

Page 28: ...0 6 65E 02 2 6990 6 00E 00 7 98E 00 7 98E 02 2 7782 7 00E 00 9 31E 00 9 31E 02 2 8451 8 00E 00 1 06E 01 1 06E 03 2 9031 9 00E 00 1 20E 01 1 20E 03 2 9542 1 00E 01 1 33E 01 1 33E 03 3 0000 2 00E 01 2 6...

Page 29: ...1 5 301 20 7 301 3 0E 5 1 477 3 0E 3 3 477 3 0E 1 5 477 30 7 477 4 0E 5 1 602 4 0E 3 3 602 4 0E 1 5 602 40 7 602 5 0E 5 1 699 5 0E 3 3 699 5 0E 1 5 699 50 7 699 6 0E 5 1 778 6 0E 3 3 778 6 0E 1 5 778...

Page 30: ...60 79 8 7 98E 03 6 70 93 1 9 31E 03 7 80 106 4 1 06E 04 8 90 119 7 1 20E 04 9 100 133 1 33E 04 10 1000 1330 1 33E 05 10 Analog output calibration 6 linear 1 9 8 VDC Provides a linear analog output in...

Page 31: ...33E 02 1 33E 00 0 470 2 50E 02 3 33E 02 3 33E 00 0 563 5 00E 02 6 67E 02 6 67E 00 0 682 7 50E 02 1 00E 01 1 00E 01 0 780 1 00E 01 1 33E 01 1 33E 01 0 867 2 50E 01 3 33E 01 3 33E 01 1 255 5 00E 01 6 67...

Page 32: ...4 7 60E 02 1 01E 03 1 01E 05 3 2396 8 00E 02 1 07E 03 1 07E 05 3 2398 Analog out calibration 9 MKS Moducell 325 amplified three times The Moducell x3 emulation is in curve form identical with the stan...

Page 33: ...Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 1 Torr Torr mbar Pascal Vout 1 00E 2 1 33E 2 1 33E0 0 100 5 00E 2 6 66E 2 6 66E0 0...

Page 34: ...100 5 0 6 66 6 66E 2 0 500 10 0 13 3 1 333E 3 1 000 50 0 66 66 6 66E 3 5 000 100 0 133 3 1 333E 4 10 000 Analog output calibration 14 MKS Baratron 1000 Torr 902B Linear10 The 1000 Torr Baratron emulat...

Page 35: ...1 4 52 2 00E 1 2 67E 1 2 67E 1 4 70 1 00E 1 1 33E 1 1 33E 1 5 00 1 00E 1 1 33E 1 1 33E 1 5 00 2 00E 1 2 67E 1 2 67E 1 5 30 3 00E 1 4 00E 1 4 00E 1 5 48 4 00E 1 5 33E 1 5 33E 1 5 60 5 00E 1 6 67E 1 6 6...

Page 36: ...5 1 20E 3 7 1 10E 5 1 47E 5 1 47E 3 7 2 2 20E 5 2 93E 5 2 93E 3 8 3 20E 5 4 27E 5 4 27E 3 8 4 4 30E 5 5 73E 5 5 73E 3 8 6 5 90E 5 7 87E 5 7 87E 3 8 8 9 00E 5 1 20E 4 1 20E 2 9 1 40E 4 1 87E 4 1 87E 2...

Page 37: ...9 00E 3 1 20E 2 1 20E 0 8 5000 P 10 Vout c Vout c log10 P c mbar 10 5 Torr 10 625 Pascal 8 5 Analog output calibration 19 Pfeiffer TPR265 Pfeiffer TPR280 Inficon TPR280 The Pfeiffer TPR265 emulation p...

Page 38: ...8 00E 03 8 00E 01 2 84 0 008 1 07E 02 1 07E 00 3 06 0 01 1 33E 02 1 33E 00 3 27 0 02 2 67E 02 2 67E 00 4 16 0 04 5 33E 02 5 33E 00 5 56 0 05 6 67E 02 6 67E 00 6 01 0 06 8 00E 02 8 00E 00 6 46 0 08 1 0...

Page 39: ...1 68E 01 1 000 1 69E 01 2 25E 01 2 25E 01 1 200 2 18E 01 2 90E 01 2 90E 01 1 400 2 74E 01 3 65E 01 3 65E 01 1 600 3 53E 01 4 71E 01 4 71E 01 1 846 0 4092 5 46E 01 5 46E 01 2 000 0 4879 6 51E 01 6 51E...

Page 40: ...0 8 00E 02 8 00E 04 9 98 750 1 00E 03 1 00E 05 9 99 Analog output calibration 25 MKS GP275 Emulation 5 6 VDC FS The GP275 emulation with 5 6VDC full scale provides a strongly non linear output with ve...

Page 41: ...4 8 4 44E 02 5 92E 02 5 92E 00 5 6 56E 02 8 74E 02 8 74E 00 5 2 9 53E 02 1 27E 01 1 27E 01 5 4 1 28E 01 1 71E 01 1 71E 01 5 6 1 67E 01 2 23E 01 2 23E 01 5 8 2 18E 01 2 90E 01 2 90E 01 6 2 68E 01 3 57...

Page 42: ...45E 01 1 45E 01 4 8 1 32E 01 1 76E 01 1 76E 01 5 1 67E 01 2 22E 01 2 22E 01 5 2 2 37E 01 3 16E 01 3 16E 01 5 4 3 10E 01 4 13E 01 4 13E 01 5 6 4 05E 01 5 40E 01 5 40E 01 5 8 5 12E 01 6 82E 01 6 82E 01...

Page 43: ...50E 01 1 00E 00 1 00E 02 2 442 1 50E 00 2 00E 00 2 00E 02 3 083 2 25E 00 3 00E 00 3 00E 02 3 452 3 00E 00 4 00E 00 4 00E 02 3 698 3 75E 00 5 00E 00 5 00E 02 3 875 4 50E 00 6 00E 00 6 00E 02 4 009 5 2...

Page 44: ...0 1 00E 02 4 45 1 14E 00 1 51E 00 1 51E 02 5 1 72E 00 2 29E 00 2 29E 02 5 44 3 00E 00 4 00E 00 4 00E 02 6 12 4 50E 00 6 00E 00 6 00E 02 6 8 4 88E 00 6 50E 00 6 50E 02 7 4 5 25E 00 7 00E 00 7 00E 02 7...

Page 45: ...00 1 1 50E 02 2 00E 02 2 00E 00 1 8 2 25E 02 3 00E 02 3 00E 00 2 5 3 00E 02 4 00E 02 4 00E 00 3 15 3 75E 02 5 00E 02 5 00E 00 3 65 4 50E 02 6 00E 02 6 00E 00 4 1 5 25E 02 7 00E 02 7 00E 00 4 5 6 00E...

Page 46: ...setpoint value If set to below relay will be energized below setpoint value xxxSPD FF xxxACKON FF Setpoint safety delay Transducer information Command Response Explanation xxxMD FF xxxACK902B FF Mode...

Page 47: ...lanation xxxBR 19200 FF xxxACK19200 FF Set communication Baud rate 4800 9600 19200 38400 57600 115200 230400 xxxAD 123 FF xxxACK123 FF Set Transducer communication address 001 to 253 xxxRSD OFF FF xxx...

Page 48: ...ries firmware download software from the Documentation CD or download from www mksinst com vtsw 2 Turn power off 3 Hold down the User switch while turning power on 4 Release the User switch 5 Run the...

Page 49: ...sure changes and there are no limits on the number of pressure cycles The setpoint relay contact endurance is minimum 2 000 000 cycles at 0 2 A 30 VDC load Analog output Q What is the update rate of t...

Page 50: ...ice and repair Q 24 VDC supply voltage has been connected to analog output Is the transducer damaged A Likely the analog output is not protected against applying power to the output pin Q Reverse volt...

Page 51: ...epair required Corroded sensor Transducer repair required Incorrect pressure value at low pressure Corroded sensor Transducer repair required Incorrect Vac adjustment has been executed Transducer expo...

Page 52: ...stance 100 m max Setpoint relay contact endurance 1 A 30 VDC load 100 000 min Setpoint relay contact endurance 0 2 A 30 VDC load 2 000 000 min Setpoint relay response time 100 ms Materials exposed to...

Page 53: ...902B Abs Piezo Operation manual 53 Dimensions KF16 flange P N 902B 1xxx mm Inch Dimensions VCR4 flange P N 902B 4xxx mm Inch...

Page 54: ...902B Abs Piezo Operation manual 54 Dimensions VCR8 flange P N 902B 5xxx mm Inch...

Page 55: ...2 For transducer part number 902B x2x2x 902B x2x3x 902B x2x5x Part number Description Interface 100013671 3 m 10ft RS485 100013672 5 m 16ft RS485 100013673 7 6m 25ft RS485 100013674 10 m 33ft RS485 PD...

Page 56: ...ssure measurements Clear backlight display Easy viewing in all environments Readout of transducer parameters 902B Absolute Piezo transducer with IP54 enclosure Sealed enclosure for harsh environments...

Page 57: ...n 20 Inductive relay load 12 Input Output Wiring 8 Internal volume 50 lock function 19 Manufacturer 20 Model 20 Moducell 325 30 NAK Code 10 NAK180 13 19 49 Operating temperature 50 Part number 3 Part...

Page 58: ...902B Absolute Piezo Vacuum Pressure Transducer RS232 RS485 Display Operation and Installation Manual p n 100017633 902B Absolute Piezo Operation and Installation Manual Rev D February 2020...

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