MKS 902B, Operation And Installation Manual, Page: 38 / 58

902B Abs Piezo Operation manual 38
Analog output calibration = 20 (OBE Special)
The OBE special emulation provides a linear output from 1 to 1000 Torr.
Torr mbar Pascal V
out
0.1 1.33E-01 1.33E+01 5
1 1.33E+00 1.33E+02 5
2 2.67E+00 2.67E+02 5.005
4 5.33E+00 5.33E+02 5.015
5 6.67E+00 6.67E+02 5.02
10 1.33E+01 1.33E+03 5.045
25 3.33E+01 3.33E+03 5.12
50 6.67E+01 6.67E+03 5.245
75 1.00E+02 1.00E+04 5.37
100 1.33E+02 1.33E+04 5.495
250 3.33E+02 3.33E+04 6.245
500 6.67E+02 6.67E+04 7.495
750 1.00E+03 1.00E+05 8.745
1000 1.33E+03 1.33E+05 9.995
Analog output calibration = 21 (Edwards DV6M)
The Edwards DV6M emulation provides a strongly non linear output with up to 10 Torr.
Torr mbar Pascal V
out
0.0001 1.33E-04 1.33E-02 2
0.0005 6.67E-04 6.67E-02 2.19
0.001 1.33E-03 1.33E-01 2.25
0.002 2.67E-03 2.67E-01 2.38
0.004 5.33E-03 5.33E-01 2.62
0.006 8.00E-03 8.00E-01 2.84
0.008 1.07E-02 1.07E+00 3.06
0.01 1.33E-02 1.33E+00 3.27
0.02 2.67E-02 2.67E+00 4.16
0.04 5.33E-02 5.33E+00 5.56
0.05 6.67E-02 6.67E+00 6.01
0.06 8.00E-02 8.00E+00 6.46
0.08 1.07E-01 1.07E+01 7.04
0.1 1.33E-01 1.33E+01 7.42
0.2 2.67E-01 2.67E+01 8.59
0.4 5.33E-01 5.33E+01 9.4
0.5 6.67E-01 6.67E+01 9.5
0.6 8.00E-01 8.00E+01 9.6
0.8 1.07E+00 1.07E+02 9.71
1 1.33E+00 1.33E+02 9.76
2 2.67E+00 2.67E+02 9.89
4 5.33E+00 5.33E+02 9.96
5 6.67E+00 6.67E+02 9.97
10 1.33E+01 1.33E+03 10
Analog output calibration = 22 (Edwards APG-M)
The Edwards APG-M emulation provides a strongly non linear output.
Torr mbar Pascal V
out
1.00E-4 1.33E-4 1.33E-1 2.0
1.02E-3 1.36E-03 1.36E-01 2.2
7.65E-3 1.02E-02 1.02E+00 3
4.12E-2 5.49E-02 5.49E+00 4
1.32E-1 1.76E-01 1.76E+01 5
5.12E-1 6.83E-01 6.83E+01 6
1.4 1.87E+00 1.87E+02 7
3.29 4.39E+00 4.39E+02 8
9.53 1.27E+01 1.27E+03 9
16.8 2.24E+01 2.24E+03 9.4
26.5 3.53E+01 3.53E+03 9.6
49.9 6.65E+01 6.65E+03 9.8
106 1.41E+02 1.41E+04 9.9
462 6.16E+02 6.16E+04 9.95
760 1.01E+03 1.01E+05 10