MKS 248A, Manual

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Appendix A: Product Specifications General Information
23
Appendix A: Product Specifications
Specifications
CE Mark Compliance
1
(248A Valve only) EMC Directive 89/336/EEC
Compatible MKS Controllers Types 250, 1250, and 260
External Leak Integrity < 1 x 10
-9
scc/sec He
Material exposed to gas (process wetted)
Metals
Elastomer Seals
Fluoroelastomer Seals
316 stainless steel
440 C stainless steel
Viton
®
(V) - standard
Neoprene
®
(N) - optional
Buna-N (B) - optional
Kalrez
®
- optional
Maximum Closed Conducatance 1 x 10
-5
scc/sec He for <10,000 sccm
<1% F.S for >10,000 sccm
Maximum Inlet Pressure
2
150 psig
Maximum Throughtput (1 atmosphere at inlet) 50 slm (maximum valve range configuration)
Minimum Controllable Flow Rate 0.2% F.S. < 100 sccm
0.1% F.S. > 100 sccm to 10,000 sccm
2% F.S. for >10,000 sccm
Pressure Connections
Standard
Optional
¼” tubing (Swagelok
®
)
4-VCR
®
(Swagelok)
4-VCO
®
(Swagelok)
Pressure Control Range 10
-4
to 5000 Torr
Response Time 15 msec
Temperature Range -10° to 60° C (14° to 140° F)
Type of Valve Proportioning, electro-magnetically operated
Due to continuing research and development activities, these product specifications are subject to change without notice.
1
Requires overall braided, shielded cables, properly grounded at both ends.
2
For 20,000 and 50,000 sccm valves, maximum operating pressure drop is 15 psig to atmosphere.