Chapter Five: Repair
General Information
21
Chapter Five: Repair
General Information
If the 248 valve instrument fails to operate properly upon receipt, check for shipping damage,
and check the cables for proper continuity. Any damage should be reported to the carrier and
MKS Instruments immediately. If it is necessary to return the unit to MKS, obtain an RMA
number (Return Material Authorization Number) from a MKS Service Center before shipping.
Please refer to the inside back cover of this manual for a list of MKS Calibration and Service
Centers.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
Summary of Contents for 248A
Page 2: ...107428 P1 Rev L 8 06 MKS Type 248A B C Control Valve...
Page 5: ...Table of Contents iv Index 27...
Page 7: ...List of Figures and Tables vi...
Page 11: ...Safety Procedures and Precautions 4 This page intentionally left blank...
Page 19: ...Setup Chapter Two Installation 12 This page intentionally left blank...
Page 21: ...General Information Chapter Three Operation 14 This page intentionally left blank...
Page 27: ...Assembly Chapter Four Maintenance 20 This page intentionally left blank...
Page 29: ...General Information Chapter Five Repair 22 This page intentionally left blank...
Page 31: ...General Information Specifications 24 This page intentionally left blank...