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Miki Pulley COUPLINGS, Manual

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Miki Pulley COUPLINGS Manual Download Page 66

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Wafer

Ball screw

Servo motor

Wafer holder

Ball screw

Servo motor

Application

SERVO FLEX SFC model for the 6-axis stage system

SERVO FLEX SFC model for the 

θ

 

-axis rotation stage

SERVO FLEX SFC model for the 

θ

 

-axis swivel stage

SERVO FLEX SFC model for the gantry mechanism

SERVO FLEX SFC model for the semiconductor 

wafer-lifting shaft

SERVO FLEX SFC model wafer stage X-axis with a semiconductor-

manufacturing machine stepper for the Y-axis

Summary of Contents for COUPLINGS

Page 1: ...COUPLINGS Flexible Couplings and Hub shaft Connections 09 06 0 SO COUP2 e 001A COUPLINGS Flexible Couplings and Hub shaft Connections 461 Imai Minami cho Nakahara Ku Kawasaki City Kanagawa Japan...

Page 2: ...t capability It has gained high reliability by its layered plate spring format as its best shape which is rigid in the torsional direction and flexible in the bending asymmetrical and axial directions...

Page 3: ......

Page 4: ...flexible couplings suitable for each purpose An optimal design using the advanced finite element method FEM is applied for the plate spring shape and strength design of each model which are important...

Page 5: ...150 165 180 A B C Time min Temperature C A B C Heat Rejection Backlash Pseudo backlash No Backlash Elastic metal coupling Metal plate spring SERVOFLEX Elastic rubber and resin coupling Rubber resin co...

Page 6: ...lexibility double element Taper shaft compatible adapter Clamp mounting only with one bolt SFC MODEL Wide selection High rigidity single element High flexibility double element Floating shaft suitable...

Page 7: ...oved to the extent possible and wind roar lowered during high speed rotation High rigidity single element High flexibility double element Ultrahigh torque transmission of 8000 N m Unique plate spring...

Page 8: ...rective RoHS Directive that prohibits six hazardous substances such as mercury lead and others SERVO FLEX A Wide Selection of Metal Plate Spring Couplings Made of High power Aluminum Alloy SFC MODEL H...

Page 9: ...11 SFC MODEL A Wide Range of Installation Methods By adoption of the clamp method installation is easy and exact The servo motor taper shaft can be optionally supported SERVO FLEX SFC...

Page 10: ...FC SA2 SFC DA2 Clamp bolt material SCM435 Surface treatment Solid lubricant film treatment Element material Plate spring SUS304 Collar SUS304 Clamp hub material High strength aluminum alloy Surface tr...

Page 11: ...d It is also compatible with the servo motor taper shaft by installing a taper adapter 13 Taper adapter option SFC MODEL The outer diameter of the clamp hub is designed so the outer diameter dimension...

Page 12: ...Max Min Max SFC 005SA2 4 6 4 6 16 16 7 7 85 1 0 4 8 2 5 6 5 2 M2 0 4 to 0 5 C C005S2B1 SFC 010SA2 4 8 4 8 19 19 35 9 15 1 05 5 8 2 3 15 8 5 2 M2 5 3 1 0 to 1 1 3 C C010S2B1 SFC 020SA2 5 10 5 10 26 23...

Page 13: ...compatible Model Moment of inertia kg m2 Mass kg Price Shape TYPE B Shape TYPE C Shape TYPE B Shape TYPE C SFC 050SA2 B 11BC 81 52 10 6 103 7 10 6 0 237 0 266 SFC 050SA2 B 14BC 87 34 10 6 109 6 10 6 0...

Page 14: ...2 4 8 4 8 19 25 9 9 15 5 5 1 05 5 8 2 3 15 8 5 8 5 2 M2 5 3 1 0 to 1 1 3 C C010D2B1 SFC 020DA2 5 10 5 10 26 32 3 10 75 7 5 1 65 9 5 3 3 10 6 10 6 2 M2 5 1 0 to 1 1 C C020D2B1 SFC 030DA2 5 10 5 10 34 2...

Page 15: ...nt aluminum hub Size SFC 040 DA2 14 B 15 B Bore diameter d1 d2 B Clamp hub BC Taper adapter Ordering Information Optional Taper shaft compatible Model Moment of inertia kg m2 Mass kg Price Shape TYPE...

Page 16: ...5SA2 050SA2 050SA2 040SA2 040SA2 035DA2 010DA2 020DA2 005DA2 080DA2 090DA2 100DA2 060DA2 050DA2 050DA2 010SA2 040DA2 040DA2 030DA2 0 0 0 5 1 0 1 5 2 0 60 50 40 30 20 10 90 80 70 0 0 5 1 0 1 5 2 0 0 60...

Page 17: ...27 9 28 060SA2 060DA2 30 5 2000 23 90 71 6 35 080SA2 080DA2 35 5 3000 15 90 39 7 28 060SA2 060DA2 30 7 2000 33 40 100 35 090SA2 090DA2 35 Simplified selection Td Ta K see below 1 Calculate torque Ta a...

Page 18: ...ompletely with a waste cloth etc 4 Make sure that the insertion length of the coupling into the shaft is kept in the position so that the target shaft is in contact with the entire length of the flang...

Page 19: ...coupling itself and lowering of shaft retaining force It is recommended to use a circular shaft for fully satisfactory coupling performance 6 After checking that no force such as compression tension e...

Page 20: ...standardized enabling methods such as the key set screw method shrink fit compatible method and others SERVO FLEX A Wide Selection of Metal Plate Spring Couplings Made of Steel SFS MODEL High Rigidit...

Page 21: ...ts The product can be delivered in parts so that this can be used even for designs where parts cannot be mounted on the finished item S W and G types A finished assembly product is also available as a...

Page 22: ...inish Pressure bolt material SCM435 Surface treatment Black oxide finish Sleeve material Equivalent of S45C Surface treatment Black oxide finish SFS S M M Pressure bolt material SCM435 Surface treatme...

Page 23: ...standard bore processing specifications The parts can be assembled immediately after delivery to the customer Target model SFS S SFS W SFS G Indicate the nominal bore diameter blank H N after the mod...

Page 24: ...2 5000 170000 122 1 80 10 3 1 80 SFS 09S M 16C 180 1 1 2 5000 170000 122 1 50 10 3 1 60 SFS 10S 250 1 1 4 13000 250000 160 2 60 10 3 2 10 SFS 10S M M 250 1 1 4 5000 250000 160 2 70 10 3 2 30 SFS 12S...

Page 25: ...l Bore dia d1 d2 D N1 N2 L LF1 LF2 S C K M M1 M2 SFS 06S M M 12 14 15 12 14 15 68 40 40 65 6 25 25 6 4 8 30 4 M6 25 4 M5 2 M5 SFS 08S M M 15 16 20 22 15 16 20 22 82 54 54 75 6 30 30 6 4 8 38 4 M6 29 4...

Page 26: ...5000 98 9 20 10 3 4 90 SFS 12W M M 450 0 6 1 one side 3 2 4400 215000 98 9 50 10 3 5 60 SFS 14W 800 0 7 1 one side 3 6 3800 390000 156 15 00 10 3 7 10 SFS 14W 35M 35M 580 0 7 1 one side 3 6 3800 39000...

Page 27: ...r dismounting M2 C A D CAD SFS 10 W 25 M 30 M Size Type W Double element Bore diameter d1 d2 M Friction locking Ordering Information SFS W M M SFS W M C Reamer bolt M L LF1 LF2 M1 T J C S LP S N2 W d1...

Page 28: ...one side 3 6 7000 390000 156 21 20 10 3 8 60 SFS 14G 35M 35M 580 0 9 1 one side 3 6 5000 390000 156 25 31 10 3 10 10 The indicated values in the moment of inertia and mass are measured with the maximu...

Page 29: ...S C2 SFS 08G Spacer 15M 16M 20M 22M 16C SFS G9 SFS M14 SFS M15 SFS M16 SFS M17 SFS C3 SFS 09G Spacer 25M 28M 16C SFS G10 SFS M18 SFS M19 SFS C4 CAD data is provided for one flange for each bore diamet...

Page 30: ...0 061 0 025 31 0 2 M6 28H 28 0 021 0 8 0 036 0 31 3 2 M6 28N 28 0 028 0 007 8 0 036 0 31 3 2 M6 30 30 0 021 0 7 0 061 0 025 33 0 2 M6 30H 30 0 021 0 8 0 036 0 33 3 2 M6 32 32 0 025 0 10 0 061 0 025 3...

Page 31: ...28M 30M 35M Standard bore diameter d1 mm 12M 14M 15M SFS 08 Standard bore diameter d2 mm 12M 14M 15M 16M 20M 22M 25M 28M 30M 35M Standard bore diameter d1 mm 15M 16M 20M 22M SFS 09 Standard bore diam...

Page 32: ...2 M6 25 63 28 30 32 68 35 73 SFS 090SS 94 71 32 68 26 5 8 5 42 4 6 8 drill M8 4 M6 2 M6 35 73 38 40 42 78 45 83 48 88 SFS 100SS 104 81 35 73 30 5 10 5 48 4 8 6 drill M8 4 M6 2 M6 38 40 42 78 45 83 48...

Page 33: ...350 350 350 350 350 48 370 370 370 370 370 370 370 370 50 390 390 390 390 390 390 390 52 410 410 410 410 410 410 SFS 140SS Standard bore diameter d2 mm 22 25 28 30 32 35 38 40 42 45 48 50 52 55 60 62...

Page 34: ...5 1 drill M8 4 M6 2 M6 25 63 28 30 32 68 35 73 SFS 090DS 94 89 32 68 26 5 10 8 5 50 42 4 6 8 drill M8 4 M6 2 M6 35 73 38 40 42 78 45 83 48 88 SFS 100DS 104 101 35 73 30 5 10 10 5 60 48 4 8 6 drill M8...

Page 35: ...5 28 30 32 35 38 40 42 45 48 50 52 55 60 62 65 70 75 80 Standard bore diameter d1 mm 38 300 300 300 300 300 300 300 300 300 300 300 300 40 315 315 315 315 315 315 315 315 315 315 315 42 330 330 330 33...

Page 36: ...tor 2 Calculate corrected torque Td applied to the coupling after deciding the service factor K based on load conditions 3 Select the size in order that the coupling permissible torque Tn becomes equa...

Page 37: ...s kept in the position so that the target shaft is in contact with the entire length of the flange LF dimension as illustrated below After this refer to the following drawing for the sequence to tight...

Page 38: ...is a dimension between a flange and a spacer Anglular Misalignment tan LG Permissible parallel offset 1 LS Full length of space S Dimension between flange on one side and spacer LS LS S B D tan B Run...

Page 39: ...olt nominal desig length M6 22 M6 22 M6 24 M6 24 M8 35 Recommended N dimensions mm 28 28 30 30 40 5 SFS S M C SFS S M M Ball screw shaft Servo motor shaft 1 10 taper Ball screw shaft Servo motor shaft...

Page 40: ...sign that lowers the coupling circumference or edge irregularity to the extent possible It is mounted by a high reliability friction lock Extremely high precision mounting is realized by using a cente...

Page 41: ...ning The coupling specially designed for high speed applications allows a maximum rotation speed of 20 000 min 1 SFM model Centering mechanisms are set for both the flange and pressure flange to achie...

Page 42: ...high speed applications allows a maximum rotation speed of 20 000 min Stable power transmission at high speed rotation is ensured SFM model High precision Positioning Centering mechanisms are set for...

Page 43: ...spring SUS304 Collar Equivalent of S45C Pressure bolt material SCM435 Surface treatment Black oxide finish Hexagon socket head cap screw Equivalent of SCM435 Surface treatment Black oxide finish Slee...

Page 44: ...1 SFF SS02 SFF SS03 SFF SS04 SFF SS05 SFF SS06 SFF SS07 SFF SS08 SFF SS09 SFF SS10 SFF 080SS 22 24 25 28 30 32 35 SFF SS11 SFF SS12 SFF SS13 SFF SS14 SFF SS15 SFF SS16 SFF SS17 SFF 090SS 28 30 32 35 3...

Page 45: ...k6 M m6 J j6 S 35 0 010 0 Combination of standard bore diameter SFF 070SS Standard bore diameter d2 mm 18 19 20 22 24 25 28 30 32 35 38 40 42 45 48 50 52 55 60 Standard bore diameter d1 mm 18 19 20 2...

Page 46: ...SS15 SFF SS16 SFF SS17 SFF 090DS Spacer 28 30 32 35 38 40 42 45 48 SFF DS03 SFF SS18 SFF SS19 SFF SS20 SFF SS21 SFF SS22 SFF SS23 SFF SS24 SFF SS25 SFF SS26 SFF 100DS Spacer 32 35 38 40 42 45 48 50 5...

Page 47: ...diameter d1 mm 22 24 25 28 30 32 35 SFF 090DS Standard bore diameter d2 mm 18 19 20 22 24 25 28 30 32 35 38 40 42 45 48 50 52 55 60 Standard bore diameter d1 mm 28 30 32 35 38 40 42 45 48 SFF 100DS S...

Page 48: ...re diameter The torsional stiffness indictes the value of element The combination of d1 and d2 is not available if both bore diameters are equal or greater than the dimension K Refer to the Combinatio...

Page 49: ...er d2 mm 28 30 32 35 38 40 42 45 48 50 52 55 60 62 65 70 75 80 Standard bore diameter d1 mm 38 40 42 45 48 50 52 55 60 62 65 SFM 140SS Standard bore diameter d2 mm 28 30 32 35 38 40 42 45 48 50 52 55...

Page 50: ...nt The combination of d1 and d2 is not available if both bore diameters are equal or greater than the dimension K Refer to the Combination of standard bore diameters The dimensional tolerance of the t...

Page 51: ...er d2 mm 28 30 32 35 38 40 42 45 48 50 52 55 60 62 65 70 75 80 Standard bore diameter d1 mm 38 40 42 45 48 50 52 55 60 62 65 SFM 140DS Standard bore diameter d2 mm 28 30 32 35 38 40 42 45 48 50 52 55...

Page 52: ...pressure bolts of the motor shaft side are tightened to the specified torque and the value of parallel offset is small enough 10 As in the sequence for the pressure bolts on the motor shaft side sequ...

Page 53: ...some cases locking force could be released by just loosening the pressure bolts Therefore a space for inserting a dismounting screw must be considered in the coupling design phase 3 Remove three pres...

Page 54: ...at the middle part This is also available for length setting according to customers requests The Largest Model Among SERVO FLEX Metal Plate Spring Couplings SFH MODEL High Rigidity High Flexibility A...

Page 55: ...igh transmission torque has been realized by thorough analysis using the advanced finite element method and torque transmission using six bolts The floating shaft type is also available with flexible...

Page 56: ...ture and Material Element material Plate spring SUS304 Colalr Equivalent of S45C Reamer bolt material SCM435 Surface treatment Black oxide finish SFH S Element material Plate spring SUS304 Collar Equi...

Page 57: ...en Mounting Method Available to Assemble in Parts SFH MODEL 59 This can also be provided with pilot bore items The mounting method can be selected freely from other than the key set screw method such...

Page 58: ...r The price of SFH S is applied to the case of the pilot bore Dimensions Model d1 d2 D N L LF S F K M CAD file No Pilot bore Min Max SFH 150S 20 22 70 152 104 101 45 11 5 94 6 M8 x 36 SFH 170S 25 28 8...

Page 59: ...maximum bore diameter The price of SFH G is applied to the case of the pilot bore Dimensions Unit mm Model d1 d2 D N L LF LS S F K M CAD file No Pilot bore Min Max SFH 150G 20 22 70 152 104 182 45 70...

Page 60: ...0 2 M10 56 56 0 030 0 15 0 075 0 032 61 0 0 3 0 2 M10 56H 56 0 030 0 16 0 043 0 60 3 0 3 0 2 M10 60 60 0 030 0 15 0 075 0 032 65 0 0 3 0 2 M10 60H 60 0 030 0 18 0 043 0 64 4 0 3 0 2 M10 60N 60 0 060...

Page 61: ...ervo motors If the eigenfrequency of the entire feed screw system is under 400 to 500Hz oscillation may occur depending on the gain adjustment of the servo motor An oscillation phenomenon of a servo m...

Page 62: ...missible value assuming that both parallel offset and angular misalignment values are zero Adjust the value to be as small as possible 2 Insert a flange hub into the target shaft Make sure that the in...

Page 63: ...ge on one side of the shaft and read the run out of the edge surface near the outer periphery of the other flange while rotating the shaft Adjust run out B so that 1 can be accomplished Radial Displac...

Page 64: ...iconductor manufacturing machines etc under a vacuum environment This specification supports position detection sensors such as encoders photo sensors etc by installing a slit plate between hubs By dr...

Page 65: ...kel plating for the standard specification SFS model It is often requested under a clean environment It is especially used for liquid crystal equipment printing machines film coaters etc The SFF model...

Page 66: ...SERVO FLEX SFC model for the 6 axis stage system SERVO FLEX SFC model for the axis rotation stage SERVO FLEX SFC model for the axis swivel stage SERVO FLEX SFC model for the gantry mechanism SERVO FL...

Page 67: ...machine tools for the machining center main shaft SERVO FLEX SFF model for machine tools for the feed shaft of the X and Z axes on the numeric value control disk SERVO FLEX SFS G type and SFH G type f...

Page 68: ...iving sides could be completely detached when the product is damaged Set up a safety mechanism such as a safety brake to avoid any danger DANGER Set up a safety mechanism 2 Mounting precautions Depend...

Page 69: ...smantlement is described in the manual we will not be responsible as well Please use our service network for repair and dismantlement DANGER Do not dismantle the product If abnormal noises or vibratio...

Page 70: ...order it is processed by H7 For bore processing below 10mm it will be H8 Tolerances other than H7 require consultation When pilot bores are additionally processed the surface treatment of the process...

Page 71: ...b1 and b2 b1 Tolerance H8 b2 Tolerance F7 r1 and r2 t1 t2 Basic dimension Tolerance p7 Basic dimension Tolerance h9 Basic dimension Tolerance Basic dimension Tolerance 4 4 10 or more 13 or less 4 0 0...

Page 72: ...2 26 50 34 40 50 50 65 100 146 100 174 60 90 60 106 60 134 30 49 30 60 30 76 10 23 10 29 0 13 0 19 0 30 0 46 0 74 6 5 9 5 15 6 7 12 7 15 2 21 2 24 11 30 11 39 20 51 32 60 41 65 80 62 43 80 100 120 174...

Page 73: ...28 8 33 17 42 25 50 40 50 50 65 90 60 106 60 134 60 49 30 60 30 76 30 29 10 40 10 13 19 0 30 0 46 0 74 0 120 0 9 5 15 13 6 18 12 4 15 9 21 5 24 0 30 14 33 9 39 21 51 30 60 65 80 32 62 80 100 107 72 1...

Page 74: ...l l s and l g Nominal length basic dimension Min Max l s Min l g Max l s Min l g Max l s Min l g Max l s Min l g Max l s Min l g Max l s Min l g Max l s Min l g Max l s Min l g Max l s Min l g Max l...

Page 75: ...4 1 9 2 3 3 3 4 4 8 5 8 6 8 7 7 8 6 Unit mm Roundness e da ds V r r r V 45 Max 120 Min f b Reference K d r g t w s Chamfering Incomplete thread 2P and below Chamfer the edge It is not necessary for M...

Page 76: ...ed such as the head has a special profile 4 Tensile loads in tests conducted in a product state shall be the values calculated based on minimum tensile strength Rm min 5 The hardness of the tip of thr...

Page 77: ...3 000 252 000 294 000 199 000 233 000 742 871 1 090 1 280 M24 353 367 000 431 000 330 000 388 000 293 000 342 000 231 000 271 000 944 1 110 1 390 1 630 M27 459 477 000 560 000 430 000 504 000 381 000...

Page 78: ...5 3 3 5 5 6 8 10 12 15 l Reference Outline mass per 1000 units kg Density 7 85kg dm3 Nominal length Min Max Flat point 2 1 8 2 2 0 021 0 029 0 05 0 059 2 5 2 3 2 7 0 025 0 037 0 063 0 08 0 099 3 2 8...

Page 79: ...45 90 4 S Chamfering Configuration and Dimension of Hexagon Bar Wrench Spanner Excerpts from JIS B 4648 1994 Technical Data Nominal designation of spanner Configuration Dimension mm Mechanical propert...

Page 80: ...ignment between two set screws The following diagram indicates the relationship between set screw open angle and shaft holding power If the Size of Set Screw Cannot be Enlarged Screw tip impression Co...

Page 81: ...e until shaft accuracy of h9 However the effect of fit accuracy is expected in the actual use environment Strength of internal thread and set screw length of fit 15 10 5 M3 98 M4 216 M5 441 M6 735 Low...

Page 82: ...m Torque wrench single function type Hexagon head Coupling size M6 14 N230SPCK 14N m 230HCK 5mm 090 100 120 M8 34 N450SPCK 34N m 450HCK 6mm 140 SFF SS DS Pressure bolt Nominal bolt size Tightening tor...

Page 83: ...crew size Tightening torque N m Torque wrench preset type Hexagon head Coupling size M8 14 5 N230LCK 230HCK 4mm M10 28 0 N450LCK 450HCK 5mm ALS R Y B Set screw Torque driver preset type N LTDK Bit SB...

Page 84: ...10 Duralumin A2017 T4 2 79 69 201 23 4 Super duralumin A2024 T4 2 77 74 29 121 23 2 Extra super duralumin A7075 T6 2 80 72 28 130 23 6 Lautan AC2A T6 2 79 72 121 24 0 Silumin AC3A F 2 66 71 121 20 4 A...

Page 85: ...43 423 400 400 72 0 57 7 82 0 62 2 46 7 57 1385 43 42 412 390 390 71 5 56 9 81 5 61 3 45 5 56 1340 42 41 402 381 381 70 9 56 2 80 9 60 4 44 3 55 1295 41 40 392 371 371 70 4 55 4 80 4 59 5 43 1 54 125...

Page 86: ...cycle engine Rigidly supported crank shafting 2 of diesel engine for ship 1 G250 250 Rigidly supported crank shafting 2 of high speed four cylinder diesel engine 1 G100 100 Crank shafting of high spee...

Page 87: ...uages Latest information including a catalog instruction manual and CAD data can be downloaded 02Downloading Abundant information other than product information also provided Enriched content 03 01 To...

Page 88: ...N GERMANY TEL 49 2129 912 0 FAX 49 2129 2790 15 GERMANY INTORQ GmbH Co KG WULMSER WEG5 D 31855 AERZEN GERMANY TEL 49 5154 9539 04 FAX 49 5154 9539 10 16 GERMANY LENZE AG P O BOX 10 13 52 D 31763 HAMEL...

Page 89: ...ODAMIENTOS FEYC S A PROGR S 127 133 POL IND ALMEDA 08940 CORNELL LL BARCELONA SPAIN TEL 34 934 740 464 FAX 34 934 745 893 38 SWEDEN ETP TRANSMISSION AB BOX 1120 S 581 11 LINKOEPING SWEDEN TEL 34 934 7...

Page 90: ...COUPLINGS Flexible Couplings and Hub shaft Connections 09 06 0 SO COUP2 e 001A COUPLINGS Flexible Couplings and Hub shaft Connections 461 Imai Minami cho Nakahara Ku Kawasaki City Kanagawa Japan...

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