By attaching a magnetic keeper to the target, the MAK source uses the
magnetics of the gun to hold the target in place.
If you have old targets, NO PROBLEM! Drill and tap your existing targets as
shown and attach the metallic keeper.
Then, snap the target into place. It’s that simple!
TARGET MOUNTING OF THE MAK
MACHINABLE MATERIALS
1 OF 1
Target
Material
Target Material
With Drilled and
Tapped Hole
Target
Material
with Keeper
Mounting
Screw
Keeper
Summary of Contents for MAK 1.3 inch
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Page 52: ...1 Simplicity in Sputtering INTRODUCING Planar Magnetron Sputtering Source The MAK...
Page 53: ...2 Simplicity in Sputtering Target Installation on the MAK Target Keeper Cathode Magnets...
Page 55: ...4 Simplicity in Sputtering MAK without target installed Target Keeper Cathode Adjustable Anode...
