MeiVac MAK 1.3 inch, Owner'S Operation And Maintenance Manual, Page: 13 / 61

Input Power Connection
12’ RG-8U Cable
with N Type Connections
RF Generator
D Connector to D
Connector
50 Pin Connectors
with metal covers
Power Connection
Auto Tuning Network
3’ or 5’ RG 393/U Cable
with HN Connector
OUTPUT TO SPUTTERING
CAUTIONS IN RF HOOK-UP
Cable length between should be a derivative of the 13.56 MHz. Wave length. Approximately 48,
24, or 12 feet and be 50 ohm RF shielded cable.
Cable length between the tuning network and sputter source should be minimized (3’ or 5’ is rec-
ommended for use with US generators).
Do not use external grounds at electrical connections; see power supply manual for addi-
tional details.
Issued September 11, 2008 13