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LH72 initial Setup Manual
Appendix 2-1
Adapter connection (Length scale)
SZ51-MS01/SZ51-DR01
* HA13A, 15A, 23A and 25A are used as head amps
Screws
Screws
Screws
Head-amp
Connector
SZ05-T01
Connector
Screws
Cable (300mm)
SZ70-1
Counter unit
Head-amp
connector
Screws
Cable (300mm)
Counter unit
Screws
Use screws to secure it in place.
Use screws to secure it in place.
SZ70-1
Use screws to secure it in place.
Scale/ Head
Resolution
Adapter
Counter
SR128(GB-A)
0.5μm
SZ70-1
LG20
LH70/71/71A/72
LY71/72
PL20B
10μm
SJ700
5μm
Scale/ Head
Resolution
Adapter 1
Adapter 2
Counter
SR108(GB)
0.5μm
SZ51-MS01
SZ70-1
LG20
LH70/71/71A/72
LY71/72
PL20A
10μm
SZ51-DR01
Scale
Resolution
Adapter
Counter
SR-1711(GP)
、
SR10A/741(GS)
、
SR50A(GF,GF-R)
、
SR30A(GM)
、
SR801/801R(GL)
0.5μm
SZ05-T01
LG20
LH70/71/71A/72
LY71/72