LEYBOLD DRYVAC DV 450 Operating Instructions Manual Download

Page: 42 / 102

Installation

300314330_002_C7 - 05/2021 - © Leybold

Purge gas
supply

Pressure switch

Pressure gauge

Seal purge

inlet side

Seal purge

exhaust side

Gas ballast

(Rotor purge)

Fig. 3.6 Double purge gas module

Solenoid valves

SV40 SV41 SV42

Summary of Contents for DRYVAC DV 450

Page 1: ...1 112065V05 1 07 1 09 1 14 1 14 2 14 3 15 1 16 1 17 1 18 1 19 1 20 1 23 1 30 1 32 1 35 1 36 1 37 1 112065FP08 1 18 1 28 1 112080V05 1 07 1 14 1 15 1 17 1 DRYVAC DV 450 DV 650 DV 800 Dry Compressing V...

Page 2: ...Pumps 25 1 4 2 Accessories 27 2 Transport and Storage 29 3 Installation 32 3 1 Placement 32 3 2 Conforming Use 34 3 2 1 Non conforming Use 34 3 3 Connecting the Intake and Exhaust Lines 36 3 3 1 Intak...

Page 3: ...Changing the Speed of the Pump 76 4 4 5 Warning and Shut off Thresholds 79 4 4 6 Gas Ballast Operation 80 4 4 7 Pumping of 100 Argon 81 4 5 Shut off and Venting 81 4 6 Removing from Service 82 5 Maint...

Page 4: ...rements and regulations Address any further safety operation and or maintenance questions to our nearest office Trained personnel for the operation of this pump are skilled workers with knowledge in t...

Page 5: ...of time with an inert gas If necessary wear suitable personal protection equipment like gloves breathing protection and protection clothing for example Hazardous Voltage Disconnect power before openin...

Page 6: ...ssure by 200 mbar max The discharge line must not be blocked or restricted Pumps with wheels must only be placed and moved on levelled horizontal surfaces Vacuum Avoid exposing any part of the human b...

Page 7: ...y way even when the pumped out gases need to be collected or contained No shutoff devices are required in the discharge line for pump opera tion If shutoff devices are installed open them before start...

Page 8: ...ince then the rotors might turn against the normal direction of rotation For this reason vent the vacuum chamber to the discharge pressure level or ensure through suitable valves that the vacuum chamb...

Page 9: ...converter 8 The pump must only be operated at the frequency specified for the motor Use only the Leybold frequency converter 9 For pumps with external frequency converter after having connected the m...

Page 10: ...arts of the pump may attain tem peratures over 80 C There then exists the risk of suffering burns Note the danger symbols on the pump and in the case of a hot pump wear the required protection equipme...

Page 11: ...e described in detail in these Operating Instructions Leybold has avail able a separate document Safety Booklet in which the hazards and general safety concepts for design operation and maintenance of...

Page 12: ...ally Contaminated parts can be detrimental to health and the environment Before beginning with any repair and maintenance work inform yourself about any possible contamination When handling contaminat...

Page 13: ...cted Make sure that suitable protec tion measures are taken to protect your hearing We recommend to wear hearing protectors earmuffs if local noise levels exceed mandatory limits 0 7 Dangers in connec...

Page 14: ...uired This screen needs to be fitted to the inlet for the pump closest to the process chamber When pumping dust containing media install a dust filter in the pro cess gas flow upstream with respect to...

Page 15: ...line for example 13 With the pump warm from operation do not clean it from the outside with water or suddenly supply very cold cooling water There is the risk of a rotor crash due to shock cooling 14...

Page 16: ...operation e g load lock applications Models from the DRYVAC C range have been designed to provide reliability in harsh process duties They are optimized for handling typical gases from the production...

Page 17: ...re filled with lubricant Synthetic oil LEYBONOL LVO 210 or PFPE LEYBONOL LVO 410 The pumps are purged with nitrogen for protection against corrosion The pump flanges have been blanked off with a seali...

Page 18: ...Leybold e shop You can download STEP files there Fig 1 2 Dimensional drawing dimensions in mm 449 13 570 417 400 200 236 334 258 300 1275 DV 450 DV 650 1290 DV 800 504 330 217 74 177 434 217 217 279...

Page 19: ...d DRYVAC DV 450 r DV 650 r DV 800 r with cooling water unit option and with purge gas und gas ballast module Fig 1 3 Dimensional drawing dimensions in mm 449 13 504 74 143 378 289 300 1213 504 258 279...

Page 20: ...le 2 3 Overvoltage category 3 Noise level with silencer at ultimate pressure acc to DIN EN ISO 2151 67 dB A KpA 3dB Noise level with rigid exhaust pipe at ultimate pressure acc to DIN EN ISO 2151 65 d...

Page 21: ...ions L x W x H 1280 x 570 x 420 mm 1200 x 450 x 400 mm 1280 x 570 x 420 mm 1200 x 450 x 400 mm 10 mm Water Water connection with cooling water unit without cooling water unit G1 2 female G1 4 Water te...

Page 22: ...ture 5 to 45 C Storage temperature 20 to 60 C Contamination grade with without purge gas module 2 Overvoltage category 3 Noise level with silencer at ultimate pressure acc to DIN EN ISO 2151 70 dB A K...

Page 23: ...pprox 590 kg 550 kg 20 kg Dimensions L x W x H 1290 x 570 x 420 mm 1200 x 450 x 400 mm 10 mm Water Water connection with cooling water unit without cooling water unit G1 2 female G1 4 Water temperatur...

Page 24: ...il lubrication of bearings and gears Running the pump at less than the minimum speed for more than 1 hour can cause damage to the pump due to a lack of lubrication 5 The gas ballast flow may vary due...

Page 25: ...ouble 24 V valve none Rubber feet LVO 210 112045V15 1 DV 450 200 V on board double 24 V valve none Rubber feet LVO 210 112045V19 1 DV 650 r 400 V extern Rack double 24 V valve none Rubber feet LVO 210...

Page 26: ...400 V on board single none installed Rubber feet LVO 410 112045V20 1 DV 450 S 200 V on board single none installed Rubber feet LVO 410 112045V29 1 DV 650 S 400 V on board single none installed Rubber...

Page 27: ...H 155224V Adapter USB RS232 800110V0103 G3 Inlet adapter DRYVAC female G4 Inlet adapter DRYVAC female 112005A18 112005A19 Outlet flange DRYVAC DN 63 ISO K x 80 mm 112005A62 Adapter DRYVAC for RUVAC WH...

Page 28: ...rner grounded Jp 112 005A25 Net filter 200V 15 kW corner grounded Jp 112 005A26 DRYVAC Energy Saver only for DV DV r with LVO 210 112005A60 Upgrade DRYVAC with Energy Saver contains the DRYVAC Energy...

Page 29: ...Fig above The pump can also be transported with a fork lift Ensure that it cannot tip over Pumps with castors Due to the castors which have been fitted the DRYVAC must only be installed on a level su...

Page 30: ...ection 4 6 Removing from Service You may use a water glycol mixture of up to 30 Temperature only for storage without cooling water 10 C to 60 C Storage site dry Maximum atmospheric humidity 95 non con...

Page 31: ...ock for a time longer than two years it should not be connected directly to the power line If doing so the capacitors might be per manently damaged Instead the DC bus of the inverter should be connect...

Page 32: ...embly work can be performed under the cleanest conditions Check whether there is any desiccant present in the intake area If required remove it When planning to fit the accessory parts Roots pump adap...

Page 33: ...il level during operation Gear side max 6 mm min 10 mm Motor side max 3 mm min 7 mm Purge gas or gas bal last valves and cooling water unit are not shown The pumps are supplied filled with synthetic o...

Page 34: ...d For this read the information given in the Safety Booklet and or consult us for details DRYVAC pumps with synthetic oil are load lock transfer and process pumps for medium rough processes Their depl...

Page 35: ...eratures Use in systems where pump frequency converter and cables are subject ed to impact stresses Operation on movable systems or system components locks or mobile pump systems Use of pump fitted ad...

Page 36: ...ding beads bolts nuts washers pieces of wire for example enter into the inlet Observe Safety Information 0 8 3 Connect the intake flange Either with intake screen and O ring or with a cen tering ring...

Page 37: ...arger diameter than the exhaust flange and 2 0 mm min thickness The exhaust line must be able to withstand 1 3 bar and 150 C Observe Safety Information 0 1 6 to 0 1 7 Keep the exhaust line free of dep...

Page 38: ...ue to shock cooling Cooling water data for the pump Materials in the cooling circuit of the pump AISI 304 red brass brass EPDM epoxy paint Feed pressure 2 7 bar g CAUTION NOTICE DRYVACs with cooling w...

Page 39: ...oling water using self sealing quick locks or shut off the feed and discharge lines with valves Notice Safety Information 0 3 7 CAUTION Fig 3 4 Cooling water connection Display Pressure reducer Pressu...

Page 40: ...s Moreover we recommend compliance with the following limit values Appearance Clear free of oils and greases Suspended matter 250 mg l Particle size 150 m Electrical conductivity 700 S cm pH value 7 0...

Page 41: ...d gas inlet inserts the purge gas directly into the pumping chamber rotor purge At the double purge gas module the gear chamber seals right and left of the pumping chamber are protected with purge gas...

Page 42: ...300314330_002_C7 05 2021 Leybold Purge gas supply Pressure switch Pressure gauge Seal purge inlet side Seal purge exhaust side Gas ballast Rotor purge Fig 3 6 Double purge gas module Solenoid valves...

Page 43: ...ig 3 7 Details for the purge gas module Range red 1 to 2 0 bar Pressure and flow too low Range green 2 5 to 3 5 bar recommended range Range red 4 5 to 9 0 bar Caution Pressure too high Regulator valve...

Page 44: ...l on the exhaust side Air filter for gas ballast inlet Pilot valve for gas ballast 3 5 1 Gas Ballast Valve only for some versions see Section 1 4 1 or option The gas ballast valve is of the electropne...

Page 45: ...mperature Switch High 281 Frequency Conv Intern TSH Temperature Switch High 280 Pt 1000 Gear Flange TSH Temperature Switch High 285 Temperature limiter Frequency conv housing Motor terminal box r PSH...

Page 46: ...xhaust shaft seal purge flow Gas types Air consider safety concerning flammable gases Nitrogen Exhaust shaft seal purge is running in 99 of all applications at all time Open exhaust shaft seal purge w...

Page 47: ...operation Use the 2 0 mm nozzle in combination with the solenoid valve customer controlled to protect against fast pressure rises Use the smaller nozzle to allow a continuous flow of gas at all time c...

Page 48: ...the frequency converter Always connect the frequency converter to ground in accordance with the international and local regulations for equipment exhibiting an increased leakage current Keep the grou...

Page 49: ...autions for wiring the control circuits Separate control circuit wiring from main circuit wiring and other high pow er lines For external control power supply use a UL Listed Class 2 power supply Use...

Page 50: ...power to the frequency con supply input verter via line filter U T1 V T2 W T3 Drive output Connects to the motor B1 B2 Braking resistor For connecting an optional braking resistor 1 2 DC reactor Link...

Page 51: ...Digital Output Warning Digital Output Failure Leybold Baseblock Pt 1000 Analog Input Temperature limiter 1 Connected using sequence input signal S1 to S6 from NPN transistor Default sink mode 0V com...

Page 52: ...start signal must be set to 0 before the reset To set a 2nd frequency see Section 4 4 4 The SC earth terminal in the frequency converter is already occupied by a ferrule If you wish to control the pu...

Page 53: ...Type of protection DIN 40050 IP 65 Cable screw connection Pg 9 MEMOBUS Modbus The frequency converter is equipped with a serial RS 485 interface with MEMOBUS Modbus RTU protocol Further details are av...

Page 54: ...hown in Fig 3 14 Use the M32 cable fitting for that purpose The terminals are designed for 10 mm2 max cable diameter Fig 3 14 Frequency converter without covers PE L1 L2 L3 Exhaust pressure line Feedt...

Page 55: ...conds Open SC and S1 to stop the DRYVAC For the connection of the control cables install a cable fitting M16x1 5 in a bore hole at the terminal box Use EMC cable fittings if required Sensors The exhau...

Page 56: ...hown in Fig 3 18 Observe safety information 0 2 16 Check the Direction of Rotation Check the direction of rotation after connection To do so open the intake Wear protective goggles when checking the d...

Page 57: ...ce the Pt 1000 cable lug on the pump and screw in the bolt with washer with a torque of 10 1 Nm Connect the pump s temperature sensor Pt 1000 to T1 and TC Lay the cable so that it does not touch any h...

Page 58: ...000 Pumpen temperatur Klemmleiste Steuerung Auslassdrucksensor X2 M 3 U1 V1 W1 X1 L1 L2 L3 PE Motor klemmenkasten Klemmleiste Leistungskreis Temperatur begrenzer DV 450 650 r Exhaust pressure sensor P...

Page 59: ...the potential equalisation conductor as depicted in Fig 3 15 Start stop connection Bridge SN and S1 to start the DRYVAC The run up time to nominal speed 120 Hz amounts to 200 seconds Open SN and S1 to...

Page 60: ...tput 0 10 V 4 20 mA 250 Default setting Output frequency Pulse train output 0 32 kHz 2 k Default setting Output frequency Multi Function Photocoupler Output 2 Failure DC 48 V max 50 mA Default setting...

Page 61: ...2021 Leybold DV 800 Fig 3 20 Terminal connections for DV 800 TB1 3 TB1 2 TB2 TB1 1 TB Terminal Block Start Stop Exhaust pressure switch Temperature limiter Fault reset Pt 1000 9k09 Resistor Use the 5...

Page 62: ...on 0 2 16 Check the Direction of Rotation Check the direction of rotation after connection To do so open the intake Wear protective goggles when checking the direction of rotation Switch on the pump a...

Page 63: ...Temperature limiter Control circuit terminal block Motor terminal box Main circuit terminal block 9ko9 Resistor The Pt 1000 cable 30 m is delivered seperately so that it does not get dam aged during...

Page 64: ...05 2021 Leybold 3 7 Leak Search after Installation Observe Safety Information 0 4 On delivery the pump is leak tight to 10 4 mbar l s integral leak checked Leak check all relevant connections after h...

Page 65: ...the DRYVAC The adapter mounting is described in the corresponding Operating Instructions After fitting we recommend running of a leak search The eye bolts at the RUVAC must not be used to lift the pum...

Page 66: ...non return valve closes automatically Installation Note the safety information provided in Sections 0 1 0 3 and 0 4 Only for non return valve 112005A15 with swivel joint Supplied equipment Non return...

Page 67: ...e g O rings and claws Note the installation position for the non return valve see Fig 3 26 The valve must open in the direction of the gas flow Observe the arrow on the check valve The lock screws sho...

Page 68: ...bus Interface For installation and operation of the optional bus interfaces please refer to the instructions of YASKAWA enclosed with the module and to Operating Instructions 300802431 regarding bus i...

Page 69: ...60 minutes with a dry nitrogen shaft seal purge before opening it to the process Hot surfaces risk of suffering burns Notice safety information 0 3 4 4 Operation Depending on the connection the pumps...

Page 70: ...the frequency reference is 0 flashes quickly the drive is disabled by a DI the drive was stopped using a fast stop DI or a run command was active during power up RUN STOP ALM REV DRV FOUT Up Arrow Ke...

Page 71: ...drive is in the alarm state On The drive is in a fault state and the output is stopped DRV LED On The drive is ready to operate the motor Off The drive is in the Verify Setup Parameter Setting or Auto...

Page 72: ...lect parameter numbers setting values etc Right Arrow Key RESET Moves the cursor to the right Resets a fault ENTER Key Selects modes parameters and is used to store settings REV LED On The motor rotat...

Page 73: ...and 120 Hz Description Parameter in Programming mode Leybold setting Standard output frequency reference d1 01 120 Hz for DV 450 650 800 The pre set limiting parameters in particular the maximum speed...

Page 74: ...ady 1 During alarm detection 1 During fault detection 1 Digital input 1 terminal S1 enabled 1 Digital input 2 terminal S2 enabled 1 Digital input 3 terminal S3 enabled 1 Digital input 4 terminal S4 en...

Page 75: ...1 A min 5 V DC 10 mA Alarm Warning Failure Pump rotating Frequency converter Terminal Block Symbol PIN No Function TB1 1A K1 Output Normally Open NO contact 1B K1 Output Normally Closed NC contact 1C...

Page 76: ...in Europe EN 50110 1 We urgently recommend to consult us first The pump must not be operated for more than one hour at frequencies below 20 Hz Setting up the Second Setpoint Frequency Enter the desir...

Page 77: ...Input Only for DV 450 650 DIP switch S4 must remain at its default position top multifunction input For all pumps Set parameter b1 01 to 1 0 default Through this the analogue input termi nal A2 become...

Page 78: ...default Through this the analogue input termi nal A2 becomes the main frequency reference DIP switch S1 must be at its default position top position I Parameter H3 09 must be at its default value 2 i...

Page 79: ...SH 200 250 50 mbar frequency converter EF2 Purge gas supply pressure optional PSL 220 2 4 bar g customer PLC Temperature pump Motor side temperature limiter TSH 285 75 C frequency converter EF3 Temper...

Page 80: ...selected so that even under the most unfavourable circumstances no explosive mixture can occur within the gas chamber during decompression process CAUTION Fig 4 6 Electropneumatic gas ballast valve o...

Page 81: ...p to atmospheric pressure If the pump has previously pumped hazard ous gases observe Safety Information in Section 0 4 and in the Safety Booklet DRYVAC without cooling water unit after switching off m...

Page 82: ...W blanking plate Disconnect the purge gas supply and seal The pump can now be removed to a workshop for decontamination and repair 4 6 Removing from Service Shut off and vent the pump system as descri...

Page 83: ...ecommend to inspect the pump system and all components after approximately 6 months under the process conditions The inspection of the components shall let corrosion attacks become apparent at an earl...

Page 84: ...vent to atmospheric pressure When the pump has become warm during operation the casing and the oil temperature may exceed 80 C Leave the pump to cool down Always wear protective gloves also to pro tec...

Page 85: ...eybold Fig 5 1 Oil change Oil fill plug Oil drain plug Oil level glass min 4 mm max 0 mm Oil level with the pump at standstill Oil level glass Oil fill plug Oil drain plug Purge gas or gas ballast val...

Page 86: ...pressed air gun 5 Thread at the air filter 5 4 Checking and Cleaning the Gas Ballast Filter The air filter serves the purpose of filtering dust particles out of the air so that only clean air can ente...

Page 87: ...d fit the filter element once more Fit the dust cap again and affix it with the locking clips 5 5 Replacing the Filter Cartridge in the Purge Gas Pressure Reducer Notice safety information in Section...

Page 88: ...ecalcify cooling water lines Clean filter insert Install the pump at a suitable place or ensure a sufficient flow of cooling air Check the pressure levels within the system Check system Clean pumping...

Page 89: ...el Check system Place the pump correctly Run a leak search and pinpoint leaks If the leak is not at the oil fill or oil drain plugs return the pump to the Leybold Service Leybold Service Leybold Servi...

Page 90: ...eset n Fault reset was input when a Run com mand was active Turn off the Run command and reset the fre quency converter to Option External Fault n n An external fault was tripped by the upper controll...

Page 91: ...ts Check the machine for damages gears etc and repair any broken parts Check the frequency converter parameter set tings Check the output contactor sequence to or Heatsink Overheat n n Surrounding tem...

Page 92: ...ost Loose wires at the frequency converter input Check the power supply Make sure that all cables are properly fixed to the correct terminals DC Under voltage n n The voltage in the DC bus fell for lo...

Page 93: ...uring Memobus Communication error EAL02 External Alarm during delay of MFDI set in S2 n External alarm during delay of MFDI settings for S2 H1 02 Delay time set in P1 05 Pressure sensor exceeds alarm...

Page 94: ...ries resistor missing Pt 1000 defective series resis tor defective Check Pt 1000 and connecting cable Check series resistor Should be 9090 Ohm CMPFT Compen sation Fault n Contact Leybold C LiM C Lim F...

Page 95: ...but no option board is installed The frequency reference source is set to pulse input but H6 01 is not 0 Install the required option board Correct the values set to b1 01 and b1 02 oPE07 Settings to...

Page 96: ...ce Further details are available on request When sending us any equipment observe the regulations given in Section 5 1 Leybold service Disposal of Waste Oil Owners of waste oil are entirely self respo...

Page 97: ...97 300314330_002_C7 05 2021 Leybold EU Declaration of Conformity...

Page 98: ...f certain hazardous substances RoHS directive as amended by Delegated Directive EU 2015 863 Based on the relevant requirements of harmonised standards EN 1012 2 1996 A1 2009 Compressors and vacuum pum...

Page 99: ...n of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012 Relevant designated standards or technical specifications are as follows EN 1012 2 1996 A1 2009 Com...

Page 100: ...to ensure the safe storage use maintenance and disposal of the product including any substance based requirements Article 33 1 Declaration EU UK This product contains Candidate List Substances of Ver...

Page 101: ...o 61010 1 12 The components are in compliance to the tested standards TUVus Certificate No CU 72190339 01 02 The T V Rheinland of North America is a Nationally Recognized Testing Laboratory NRTL for t...

Page 102: ...LV_30071_2021 05 21 Leybold GmbH Bonner Strasse 498 50968 Cologne GERMANY T 49 0 221 347 0 info leybold com www leybold com...

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LEYBOLD DRYVAC DV 450, Operating Instructions Manual

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