LEYBOLD 250000V01, Operating Manual

Page: 98 / 112

Troubleshooting
98
GA10218_002_C0 - 10/2016 - © Leybold GmbH
E35 Anode-cathode voltage is too
high!
Anode-cathode voltage is > 130 V
MSV board is faulty.
E36 Anode-cathode voltage is too
low.
Anode-cathode voltage is < 30 V.
MSV board is faulty.
Fuse F4 on MSV board has blown.
E37 Suppressor voltage reference
value too high!
Signal MFSZH on MSV board is active. Suppressor signal command variable
is too high.
– Suppressor voltage has a short circuit.
– MSV is faulty.
E38 Suppressor potential too high! Suppressor potential is higher than 363V.
MSV board is faulty.
E39 Suppressor potential is too low. Suppressor potential is lower than 297V.
MSV board is faulty.
E40 The anode potential exceeds its
nominal value by over 10%!
The actual anode potential exceeds its nominal value by 10%. The nominal
value can be displayed in the service menu.
MSV is faulty.
MC 68 is faulty
E41 The anode potential has dropped
below its nominal value by over
10%!
The actual anode potential has dropped below its nominal value by 10%. The
nominal value can be displayed in the service menu.
MSV is faulty.
MC 68 is faulty.
E42 Nominal value of the anode
potential is too high!
Signal MFAZH on MSV board is active.
Anode voltage has been short circuited.
Nominal value of the anode voltage is too high. Anode voltage is limited to
about 1,200 V.
E43 Cathode current is too high!
MSV Cat-Heater >>
Signal MPKZH on MSV board is active. Cathode current is too high, I > 3.6
A.
MSV is faulty.
E44 Cathode current is too low! Signal MPKZN on MSV board is active. Cathode current is too low,

I < 0.2 A.
MSV is faulty.
Faulty ion source connector or cable.
W45 Emission for cathode 1 can not
be switched on!
Signal MSIBE on MSV board is not active. Emission for cathode 1 can not be
switched on. PHOENIX L300i switches to cathode 2. Please order a new ion
source.
Cathode 1 is defective
MSV board is defective
No. Displayed Message Description and possible solutions