GA 01.701/5.02 - 07/01
Contents
2
Contents
Important Safety Considerations . . . . . . . . . . . . . 4
1
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1
Principles of Operation . . . . . . . . . . . . . . . . . 6
1.2
Specifications . . . . . . . . . . . . . . . . . . . . . . . . 7
2
Installation and Operation . . . . . . . . . . . . 10
2.1
Unpacking the Pump . . . . . . . . . . . . . . . . . . 10
2.2
Installation . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.3
Operation of the Pump . . . . . . . . . . . . . . . . 11
2.4
Electrical Connection . . . . . . . . . . . . . . . . . .11
3
Application Notes . . . . . . . . . . . . . . . . . . . 13
3.1
General Application . . . . . . . . . . . . . . . . . . . 13
3.2
EcoDry M Pumps for Backing of
High-Vacuum Pumps . . . . . . . . . . . . . . . . . 13
3.3
Condensable Vapours & Liquids . . . . . . . . . 13
3.4
Use on Wet Processes . . . . . . . . . . . . . . . . 13
4
Maintenance . . . . . . . . . . . . . . . . . . . . . . . .14
5
Troubleshooting . . . . . . . . . . . . . . . . . . . . .15
EC Declaration of Conformity . . . . . . . . . 16
Figures
The references to figures, e.g. (1/2) consist of the Fig.
No. and the Item No. in that order.
Leybold-Service
If a pump is returned to Leybold, indicate whether the
pump is free of substances damaging to health or
whether it is contaminated.
If it is contaminated also indicate the nature of the
hazard. Leybold must return any pumps without a
“Declaration of Contamination” to the sender’s address.
Indicates procedures that must be strictly
observed to prevent hazards to persons.
Indicates procedures that must strictly be
observed to prevent damage to, or destruc-
tion of the equipment.
Warning
Caution
We reserve the right to modify the design and the speci-
fied data. The illustrations are not binding.
Summary of Contents for 130 000
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