Application Notes
3.3 Condensable Vapours &
Liquids
The EcoDry M pump is not suited for pro-
longed pumping of condensable vapours
above the specified water vapour tolerance.
Pumping of liquids is to be avoided and will
damage the pump.
• Normal amounts of water vapour in atmospheric air
will not affect pump performance.
3.4 Use on Wet Processes
Do not allow direct ingestion of liquids into
the pump.
Note the vapour tolerance levels which
apply to this pump. In case of any questions
in this matter do not hesitate to get in touch
with Leybold Vacuum.
Generally the following applies:
• The lines connected to the pump should be so rated
that no liquids can suddenly enter the pump.
• The chambers should only contain liquids having a
low vapour pressure.
• Note the safety information provided in these
Operating Instructions.
13
GA 01.701/5.02 -07/01
Please also note the information provided
on potential hazards given on pages 4, 5
and the subsequent pages.
3.1 General Application
The EcoDry M is ideal for applications that require the
achievement of pressures as low as 2·10
-2
mbar
(2 Pa, 15 mTorr ) without the risk of contamination from
liquid lubricants. The pump may be operated intermit-
tently as needed, or continuously for as long as 2 years
without maintenance. Owing to its freedom from hydro-
carbons and no compromise in performance, the EcoDry
M replaces single-stage oil-sealed rotary pumps in many
applications.
Do not use the pump for applications that
produce abrasive or adhesive substances
or condensable vapours that can leave
adhesive or high viscosity deposits.
Also the formation of thicker deposits
should be avoided since these too may form
adhesive or high viscosity deposits.
3.2 EcoDry M Pumps for
Backing of High-Vacuum
Pumps
3.2.1 Turbopumps and Wide Range Turbo
Pumps
The EcoDry M is an oil-free dry compressing vacuum
pump for safe operation of turbomolecular pumps which
require a forevacuum pressure of p > 2 ·10
-2
mbar.
The design of the pump permits the EcoDry M to be ope-
rated in connection with classic and wide range turbo-
molecular pumps.
3 Application Notes
Caution
Caution
Warning
Caution
Summary of Contents for 130 000
Page 17: ...17 GA 01 701 5 02 07 01...
