MJ400010H1
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When designing the piping system employing the Mass Flow Controller, pay particular attention to that this
instrument may have to be removed for maintenance jobs such as inspection and disassembling washing.
Take into full consideration the arrangement having a space enabling easy removing and reinstallation
piping jobs. During installing this instrument, pay particular attention so that no foreign matters intrude from
the inlet or outlet. Hold attaching the protective caps on the both ends until the installation.
[Installation procedure]
a. Install Model 3660 Series Mass Flow Controller in a clean-dried place in which no impacts and
vibrations occur.
b. Secure a sufficient space allowing span or zero-point adjustments.
c.
Perform piping so that it can be easily removed for request for maintenance service to us.
Note): Applying toxic gas may cause a contamination or corrosion in
the Mass Flow Controller due to a piping leak or inproper purging.
Before the application, fully check to ensure that no leaks exist in
the piping, and perform purging with dried N
2
gas.
d. There exist no limits for installation posture. However, apply Model 3660 Series Mass Flow Controller at
the physically no forcible status. Install it levelly. In the case of other installation postures, perform
zero-point adjustment after the warming-up.
d. When installing Model 3660 Series controller,
existence of an angle piping just in front
of the controller worsens the accuracy a little.
CAUTION
:
The valve control of model 3660 series controller is intended for
accurate control, not-having been designed for complete shutting-off.
If a complete shutting-off is required, it is recommended to mount a
shutting-off valve on the inlet or outlet.
CAUTION
:
The flow signal output from this instrument Model 3660 series
r15V DC near the power voltage during valve full
opening. So the circuit to be connected shall be
its-point-considered.
CAUTION
:
As Model 3660 series Mass Flow Controller does not have a
complete shutting-off valve, a solenoid valve may be separately
mounted. At that time, a small quantity of gas is confined between the
down-flow of the controller and the solenoid valve, thereby causing a
surging during driving of the controller. Pay particular attention to it.
The surging can be weakened by placing the controller closer to the
solenoid valve, or by placing the solenoid valve on the upper-flow
side of the controller.
5. Operation Procedure
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