MJ400010H1
- 10
-
6. Troubleshooting
6-1. Troubleshooting and actions
for quality assurance, and cautions for maintenance
Trouble Possible
Cause
Check/Corrective
Actions
a.
The power switch is not ON.
1.
Ensure that the power indication lamp is
lit.
b.
Connection mistake of the
indicator and connector.
1.
Reconnect the connector.
Ensure that each line has a correct color.
c.
Gas does not reach.
1.
2
Ensure that the gas cylinder has an
original pressure and the valve is open.
Ensure that the solenoid valve and
3-way valve built-in the line normally
operate.
Ensure that the line filter is not
clogged.
d.
Obstacles exist in the outlet
piping of the Mass Flow
Controller.
1.
Check for solenoid valve, 3way valve and
air valve.
1. The sensor
does not
output.
e.
A forcible closing signal has
been input in the Mass Flow
Controller.
1. Ensure that no valve forcible closing
signals (-15V DC) have been input in Pin
NO.1.
f.
Power
error
1.
Remove the cable and check for
±
15V
DC(Within
±
4%) with a tester. If the
power is not ON, replace the power switch
with new one.
g. Orifice
clogging
1.
Disassembling washing or re- placement
is required. In this case, replacement of
the sen- sor is required. Return it to us.
h. Sensor
tube
clogging
1. At
this
time, the gas continuously flows. So
check for it. In case, the sensor has to be
replaced. Return it to us.
2. The output
does not
become zero
(0).
a.
Internal leak or external leak of
the control valve.
1. Remove the forward piping of the mass
flow controller and discharge the gas.
Then ensure that the output becomes zero
(0).
b.
Command error or connection
error of the external setting
appliance.
1.
Check for command and external setting
appliance wirings.
