MJ400010H1
- 3
-
1. Specifications
Model 3660 series Mass Flow Controller accurately measures and controls gas flow. This
instrument is used for flow control in a wide range of application including various analyzers,
combustion, and biotechnology.
1-1. Specifications
Model
Model 3660
Model 3665
Flow Ranges
50SCCM
〜
5SLM N
2
at 0
℃
10
〜
20 SLM N
2
at 0
℃
30
〜
150 SLM N
2
at 0
℃
Settling Time
Within 98%F.S., 2 seconds
Within 98%F.S., 3 seconds
Accuracy
Within
±
1.5%F.S. Within
±
2%F.S.
Repeatability
Within
±
0.5%F.S. Within
±
0.5%F.S.
Control Range
2 – 100%
5 – 100%
Differential Pressure
49kPa – 294kPa
(F.S. 10SCCM - 5SLM)
98kPa – 294kPa
(F.S. 10SLM - 20SLM)
148kPa – 343kPa
(F.S. 30SLM - 150SLM)
Pressure Resistance
980kPa
Leak Integrity
1 x 10
-8
Pam
3
/s He
Ambient Temperature
Within 5 – 45
℃
(Accuracy
warranty:15 –35
℃
)
Storing Temperature
60
℃
(Max.)
Command Input
0.01- 5VDC
(Valve is fully closed at setting input of F.S.2% or less).
Output Signal
0 – 5V DC
Power
Supply
Sensitivity
+15V DC 100mA
-15VD 200mA
Electrical Connections
Dsub-9Pin Male SEMI standard Reference pin arrangement
Valve Type
Normally-closed
type (Solenoid)
Configuration material
SUS316,SUS316L, VITON,TEFLON
1-2. Unit of Flow
Our mass flow controller is based on the SEMIE12-91(Semi-standard).
The applied unit is SLM (Standard Liter per Minute) or SCCM (Standard Cubic per Minute).The
status of this gas is the same as the reference(normal) conditions of 0
℃
, 101.325kPa(abs). If the
applied flow unit and definition thereon differ, inquire us of it or give us your instructions. If the unit
you require is a SI unit or unit approved by the current measuring law, we will make a production
on the basis of the unit you require.
