MJ400010H1
Mass
Flow
Controller
MODEL
3660
Instruction
Manual
KOJIMA INSTRUMENT INCORPORATION
Page 1: ...MJ400010H1 Mass Flow Controller MODEL 3660 Instruction Manual KOJIMA INSTRUMENT INCORPORATION ...
Page 2: ... future without prior notice for improvements For delivery of the products all possible cautions have been paid Should any defective points errors or description omissions exist in the manual notify us of them The following are picture indications for cautions to be noted observed before application or for safe application of the product They have been made in the instruction manual and on the spe...
Page 3: ...nection Diagram 3 3 Cautions for Wiring Connection 4 Installation and Piping 4 1 Storage and Application Environment 4 2 Piping System Washing 4 3 In line Filter 4 4 Securing of The Operational Pressure 4 5 Combined Use of The Stop Value 4 6 Installation 5 Operational Procedure 6 Troubleshooting 7 Dimensions 8 Cautions for Handling 9 Product Warranty 3 3 3 4 5 5 5 6 6 6 7 7 7 7 8 9 10 10 13 14 ...
Page 4: ...ent Temperature Within 5 45 Accuracy warranty 15 35 Storing Temperature 60 Max Command Input 0 01 5VDC Valve is fully closed at setting input of F S 2 or less Output Signal 0 5V DC Power Supply Sensitivity 15V DC 100mA 15VD 200mA Electrical Connections Dsub 9Pin Male SEMI standard Reference pin arrangement Valve Type Normally closed type Solenoid Configuration material SUS316 SUS316L VITON TEFLON ...
Page 5: ... resistance value thus detecting the Mass Flow Principal of the thermal flow sensor Principal of Operation The change of the Mass Flow is represented as a change of the voltage signal by the electronic circuit through utilization of this principal Selecting mounting a bypass capillary for making the flow detecting sensor bypass the flow limits the gas flow in this section thus enabling the flow ra...
Page 6: ...rce 15V DC 100mA 200mA Peripheral appliances Basic examples DC power source PSK 1FB 85 132V AC 50 60Hz 1 0A Flow indicator DPM 3 5V 5 DC 0 12A Flow setting appliance CK 1A Resistance 10kohm Special purpose One 1 set If 1m or longer cables are required cable contact us 3 2 Electric Connection Diagram Example In the case of a combination of the PSK 1FB and DPM 3 MODEL 3660 SERIES Details of the 3660...
Page 7: ...nments Applying this instrument near the equipment such as high frequency induction furnace or in the place in which various power systems are concentrated may easily intrude noise into the Mass Flow Controller thereby interfering normal operation Eliminate the noise and prevent its intrusion before application Avoid application in a place having a difficulty in maintaining such normal operation A...
Page 8: ...erating Model 3660 SERIES Mass Flow Controller correctly design the piping system so that the pressure difference between the inlet and outlet sides is always in the range of 49kPa 294kPa F S 10 20SLM model 98 294kPa F S 30 150SLM model 148 343kPa and additionally gets stable It is necessary to mount a pressure regulator on the proper portion of the piping reaching the inlet side of this instrumen...
Page 9: ... posture However apply Model 3660 Series Mass Flow Controller at the physically no forcible status Install it levelly In the case of other installation postures perform zero point adjustment after the warming up d When installing Model 3660 Series controller existence of an angle piping just in front of the controller worsens the accuracy a little CAUTION The valve control of model 3660 series con...
Page 10: ...w meter never move the span pot SPAN CALIBRATION PROCEDURE Connect a reference flow meter to the gas outlet side of the main machine Add a gas pressure within the range of the applied pressure to the inlet side and set the flow at 100 5V DC F S After the indicated value gets stable at its status measure the flow Turn the span pot so that the indication of the flow meter gets a full scale flow It m...
Page 11: ... not output e A forcible closing signal has been input in the Mass Flow Controller 1 Ensure that no valve forcible closing signals 15V DC have been input in Pin NO 1 f Power error 1 Remove the cable and check for 15V DC Within 4 with a tester If the power is not ON replace the power switch with new one g Orifice clogging 1 Disassembling washing or re placement is required In this case replacement ...
Page 12: ...ly fit in the connector 4 The set indication is not made a Over rising or error of the inlet pressure of the Mass Flow Controller The differential pressure between the inlet and outlet is not proper 1 Provide the proper pressure as specified in the catalogue Make a proper differential pressure b The pressure loss of the piping is greater Or the clogged filter or check valve has made a greater pres...
Page 13: ...ve forcibly closing signal 15V DC in Pin NO 1 and check for gas stop If the gas does not stop adjust the valve or return it to us If gas stops the electronic circuit error is considered a cause Return it to us b Internal leak due to dust adhering to the seal of control valve 1 Return the valve to us for its disassembling washing 7 Also with the command being zero 0 the gas continues flowing c The ...
Page 14: ...MJ400010H1 13 7 Outside drawing Mass Flow Controller MODEL 3660 The dimension within parentheses is MODEL 3665 ...
Page 15: ... packing status being kept as much as possible so as to inhibit its damages by accidents during transportation 8 3 Recommend Storage Practice After delivered to you model 3660 Series may cause an unexpected malfunction due to the longer period s storage If the longer period s storage is anticipated pay particular attentions to the following items 1 Store model 3660 Series while keeping the shipmen...
Page 16: ...pplications repairs or remodeling Including the case in which the manufacturing specification differs from the application conditions b Malfunctions due to the falling after the purchase c Malfunctions caused by natural disasters such as fire earthquake water disaster and lightning stoke or riots or wars d Malfunctions caused by mixing in of foreign matters out of the piping e Malfunctions caused ...
Page 17: ...0 Fax 81 3 3664 0210 Nagoya Branch HanagurumaBldg Minamikan8F 5 16 17 Meieki Nakamura ku Nagoya 450 0002 Tel 81 52 583 0411 Fax 81 52 569 1286 Osaka Branch TEKdainiBldg 8F 1 23 20 Esaka cho Suita Osaka 564 0063 Tel 81 6 4861 4441 Fax 81 6 4861 4455 Kyusyu Branch 2020 3 Tabaru Shimomennohira Mashikimachi Kamimashiki gun Kumamoto 861 2202 Tel 81 96 214 5344 Fax 81 96 214 5651 Kyotanebe factory 1 3 A...
