Diaphragm Vacuum Pumps UN012, UN024, UN036_I
Servicing
15
1
Support
ring
2
Wave
diaphragm
3
Intermediate plate
4
Head plate
5
Spring washer
6
Cap nut
7
Clamping disc
8
Connection rod disc
9
Connection rod extension
10
O-ring
11
Valve plate
Fig. 6: Pump head (symbolic)
Fig. 7: Arrangement of the disk spring for material version of pump head