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2-4 GENERAL DESCRIPTION AND SPECIFICATIONS
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
Table 2-2. Pin descriptions for the DB-15 MFC connectors on the Auto Controller.
Pin
number
Description
1
Command Common. Return for 0-5 volt output to MFC on pin 8.
2
Mass
fl
ow read back from MFC. 0-5 volt signal from the MFC
referenced to pin 10.
3
No contact.
4
Valve off. Connected to common when MFC setpoint is set to
zero or when unit is in the standby mode, otherwise
fl
oated.
5
+15 volts DC for MFC supply voltage, referenced to pin 9.
6
- 15 volts DC for MFC supply voltage, referenced to pin 9.
7
No contact.
8
Setpoint out to MFC. 0-5 volts, referenced to pin 1.
9
Common for MFC supply voltages on pins 5 and 6.
10
Read back common. Reference for the 0-5 volt mass
fl
ow read-
back from the MFC on pin 2.
11
No contact.
12
No contact.
13
No contact.
14
Chassis ground
15
No contact.