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Kaufman & Robinson eHC 3005A, Manual

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Kaufman & Robinson eHC 3005A Manual Download Page 33

 

 

GENERAL OPERATION                                                                                      5-3

_______________________________________________________________________

Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com

Fig. 5-1. Schematic block diagram of ion source and power supplies.

Summary of Contents for eHC 3005A

Page 1: ...9350 Internet www ionsources com Copyright 2007 by Kaufman Robinson Inc All rights reserved No part of this publication may be reproduced without written permission December 2007 VERSION 3 AUTOMATED C...

Page 2: ...ns Between Controller Components 3 3 3 5 Connect Controller to Ion Source 3 6 4 INITIAL OPERATION 4 1 4 1 Gas 4 1 4 2 Power On 4 1 4 3 Operating Mode 4 1 4 3 1 Auto Gas Mode 4 1 4 3 1 1 Program Select...

Page 3: ...0 6 4 3 Communication overview 6 10 6 4 4 Commands queries and responses 6 10 6 4 4 1 VRB Verbose Command 6 11 6 4 4 2 COM Enable RS 232 Command or Status Query 6 12 6 4 4 3 IDN Unit Identification Qu...

Page 4: ...Input Power Requirements 3 2 3 3 Pin descriptions for the rear panel BD 15 female MFC output connectors 3 5 6 1 Remote program selection using pins 16 and 34 on the DB 37 6 2 6 2 Pin descriptions for...

Page 5: ...s CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com 1 SAFETY Caution High Voltage Only technically qualified personnel should install maintain and troubleshoot the equipment descr...

Page 6: ...ht and dimensions of each controller are outlined in the following table This section gives a general overview of the Auto Controller package with more detailed information in the later sections of th...

Page 7: ...rear panel Four relay contacts are also available on the rear panel if additional positive shut off valves are desired for the gas feed system Three of the gas channels are available for use with the...

Page 8: ...and the Keeper and Discharge power supplies The Discharge Pow er Supply provides voltage and current to the anode of the End Hall ion source This power supply communicates to the Auto Controller throu...

Page 9: ...MFC on pin 8 2 Mass flow read back from MFC 0 5 volt signal from the MFC referenced to pin 10 3 No contact 4 Valve off Connected to common when MFC setpoint is set to zero or when unit is in the stand...

Page 10: ...5 _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 I...

Page 11: ...Analog Remote Short Red Wire Short Black Wire RS 232 Remote Interlock 2 6 GENERAL DESCRIPTION AND SPECIFICATIONS _______________________________________________________________________ Copyright 2010...

Page 12: ...the completeness of order If any damage has occurred contact Kaufman Robinson Inc in addition to the shipping company to report the damage see Section 8 Retain packaging materials for any future ship...

Page 13: ...V 1 50 60 Hz 208 230 V 1 50 60 Hz 0 75 A 0 35 A Keeper Power Supply 115 V 1 50 60 Hz 208 230 V 1 50 60 Hz 14 A 7 5 A Emission Power Supply 115 V 1 50 60 Hz 208 230 V 1 50 60 Hz 14 A 7 5 A Discharge Po...

Page 14: ...connectors located on the rear panel of the Discharge Power Supply and tighten the screw above the appropriate connector Insert the end of the operating cable BLACK wire into one of the negative conn...

Page 15: ...The RS 485 connectors are not device specific so they can be plugged into any of the RS 485 connectors Attach the other ends of the three RS 485 cables to the connectors labeled RS 485 located on the...

Page 16: ...ctor or the female DB 9 connector These remote interfaces require knowledge of the ion source operation which is given in the next two sections of this manual The detailed descriptions for remote cont...

Page 17: ...n source manual The ion source installation procedures cover installation of the ion source vacuum cables gas tubing inside the vacuum chamber as well as electrical and gas feedthroughs in the wall of...

Page 18: ..._______________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com...

Page 19: ...Analog Remote Short Red Wire Short Black Wire RS 232 Remote Interlock 3 8 INSTALLATION _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 13...

Page 20: ...ther process gases please contact Kaufman Robinson Inc The bottle regulator and mass flow controller s should be in stalled and gas lines evacuated as described in Section 2 4 3 of the Ion Source manu...

Page 21: ...without change Otherwise the parameters will be ramped to the newly selected program 4 3 1 2 Gas Setpoints There are four gas channels Pressing and releasing the Gas Channel Select button will increme...

Page 22: ...d by selecting the gas channel and turning the knob on the front panel of the gas controller before the auto controller is enabled For the initial operation leave the gases set at the programmed setpo...

Page 23: ...s Notice that the yellow setpoint LED below the display is on to indicate that the setpoint is being viewed Once the Auto Controller is enabled the run values will be displayed and the green run LED w...

Page 24: ...sh to indicate that the program has not been saved The new values can be acquired by pressing and holding the acquire setpoints button until the program LED stops flashing Once the controller is enabl...

Page 25: ...nt Adjustment Repeatedly pressing and releasing the Select Program button will cycle through the programs If more than two seconds elapses before the Select Program button is pressed and released the...

Page 26: ...ion above 120 V 4 3 2 1 Constant Current Mode The operating condition selected for this demonstration is with a 2 5A 120 V discharge which is Constant Current Mode operation These conditions are based...

Page 27: ...r Sup ply And wait a couple of seconds for the keeper to start the hollow cathode as indicted by the Keeper Amps display reading 1 5 amps Reduce the flow to gas channel 4 to 10 sccm Press the white En...

Page 28: ...ating range of the ion source Press the white Enable Standby button on the Auto Controller Select Gas 4 using the white Gas Channel Select button on the Auto Controller and then turn the Gas Adjust kn...

Page 29: ...on the Discharge Power Supply Adjust the gas flow for channel 1 using the Gas Adjust Knob on the Auto Controller until the discharge current is approximately 2 5 A Operate the ion source for at least...

Page 30: ...r discharge voltages of 120 volts or more The discharge current is usually set to maximum while the operat ing voltage is set to the desired value on the front panel The gas flow to the ion source is...

Page 31: ...gh enough pressure that a Paschen discharge can be established when the keeper voltage Vk of 800 volts is applied The Paschen discharge heats the hollow cathode until surfaces inside the cathode tube...

Page 32: ...______________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www...

Page 33: ..._____________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 5 1 S...

Page 34: ...panel DB 25 connector to enable the pro gram selected from the front panel 6 2 Remote Control using the DB 37 Connector The DB 37 connector is an extended control set which gives the operator full ac...

Page 35: ...he valve off command to the mass flow controller The gas relays are also de energized and the valve off commands are sent to the mass flow controllers when the Auto Controller is in standby This is tr...

Page 36: ...Setpoints Using the Gas Only Mode When the Gas Only mode is selected from the front panel the Auto Con troller continuously responds to the applied gas setpoints once the Auto Controller is enabled 6...

Page 37: ...Reference for gas channel setpoints See section 6 2 3 1 below 22 Discharge Current Setpoint 0 5 volts corresponds with 0 to the maximum level of discharge current in amps for the Discharge Power Supp...

Page 38: ...hannel 1 MFC Referenced to pin 27 10 Channel 3 Gas Flow Output 0 5 volt corresponds with 0 to the maxi mum output in sccm for the channel 3 MFC Referenced to pin 27 20 Discharge Current Output 0 5 vol...

Page 39: ...e or error message is cleared when the remote enable pin 36 is released from common pin 7 or 8 The Beam Good function gives a real time check of the operating parameters If the operating parameters ar...

Page 40: ...ion current in amps for the Emission Power Supply being used Referenced to pin 7 or 8 5 Auxiliary 12 volts Referenced to pin 7 or 8 6 Emission Voltage Output 0 5 volts corresponds with 0 to the maximu...

Page 41: ...put 0 5 volts corresponds with 0 to the maxi mum level of discharge current in amps for the Discharge Power Sup ply that is being used 21 Discharge Voltage Output 0 5 volts corresponds with 0 to the m...

Page 42: ...select pin 18 is connected to common pin 7 or 8 37 Keeper current output 0 5 volts corresponds with 0 2 amps Referenced to common pin 7 or 8 6 3 Interlock A two pin interlock is located on the rear p...

Page 43: ...ve a male DB 9 connector to connect to the female connector on the rear panel of the Auto Controller 6 4 2 Communication settings The baud rate is 9600 b s with 8 data bits one stop bit and no parity...

Page 44: ...d All commands are upper case sensitive Lower case commands and que ries will be interpreted as invalid commands Any command or query that requires a response must be terminated at the minimum with a...

Page 45: ...mand will enable disable or query the status of RS232 remote control of the auto controller depending on the parameter following it The default power up state is Disabled In order to Enable the RS232...

Page 46: ...mote control state If the unit is in Verbose the response is Enabled or Disabled If the unit is in Terse the response is 1 or 0 Example COM 0 cr lf Disable RS 232 remote control Example COM 1 cr lf En...

Page 47: ...Terse mode Command RST Example RST cr lf Note The only recoverable errors are HLP 10 Start Failure HLP 11 Run Fault HLP 12 Gas Fault 6 4 4 5 TST Self Test Query The TST command performs a unit self te...

Page 48: ...e Parameter Response 0 Standby 1 Enabled return current state Example OUT 0 cr lf Put the unit in Standby Example OUT 1 cr lf Enable the unit Example OUT cr lf Get present state of output If the unit...

Page 49: ...st be in STANDBY If the COM is not Enabled the command is ignored both in Terse and Verbose Example MDE cr lf Returns present mode If the unit is in Verbose the response is Auto Gas Manual Gas or Gas...

Page 50: ...ral form of the program read write command is Command P program parameter value The parameter and value fields are optional The command can be turned into a query by substituting for the program param...

Page 51: ...for each parameter may have decimal points and decimal places included or omitted if there are no significant digits beyond the decimal point However if the first significant digit falls after a decim...

Page 52: ...and appear in the order shown Any value that is to remain unchanged can be omitted but the comma delimiter between parameters must be included in the input string In the second example DSI and BSV re...

Page 53: ...et to maximum while the other is set to the desired operating value The gas flow determines the discharge parameter that has been set to maximum If the Auto Controller is in the Gas Only mode all the...

Page 54: ...e Ion Source and Hollow Cathode to prevent damage Review the ion source and hollow cathode manuals to determine appropriate operating conditions Contact KRI for assistance in establishing operating co...

Page 55: ...low Cathode with BV Hollow Cathode without BV Gas Only Unknown In TERSE the responses are 0 1 2 3 or 4 respectively 6 4 4 12 LRN Learn Command or Learn Query The current status of LRN can be queried a...

Page 56: ...____ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Example LRN 0 cr lf Example LRN 1 cr lf Ex...

Page 57: ...nal function of displaying help codes and error messages If it becomes necessary to display a help code or an error message the Auto Controller may switch to standby mode depend ing on the particular...

Page 58: ...failed The discharge did not start Press and release the STANDBY ENABLE button or remove the remote enable signal to clear the code The unit remains in STANDBY until STANDBY EN ABLE is pressed again o...

Page 59: ...ing condition the gas flow may be too high or too low De crease or increase flow Open or shorted discharge an ode cable Inspect in vacuum discharge cable and replace if necessary Not all damage to the...

Page 60: ...ake sure there is power to the power supplies and that they are turned on Int LOC Open Interlock An open interlock prevents the Auto Controller from going to the ENABLE state and holds it in STANDBY T...

Page 61: ...tact KRI HLP 7 RS 485 Serial Communication Lost Communication for remote RS 485 communication was detected and then lost Check connection of the RS 485 cables Make sure Auto Controller has in put powe...

Page 62: ...no blockage of the vents on the rear panel Ambient temperature is too high Reduce ambient temperature be low 40 C Not Rdy Not Ready Keeper Pow er Supply is in STANDBY Insufficient line voltage Message...

Page 63: ...e RS 485 cables Make sure Auto Controller has in put power and is turned on HLP 8 RS 232 Interface Serial Common Error High current flowing in the ground connection of the serial interface between the...

Page 64: ...end Hall ion source in auto mode it will learn how to reach the operating conditions the first time a program is used The next time the feedback will home in more quickly Since this effects the starti...

Page 65: ...roller beeps if the operating parameters have been changed without saving them or when a fault occurs Turn the Gas Adjust knob to select the desired number of beeps When finished press and release the...

Page 66: ...under this Limited Warranty is at KRI s option to repair or replace any defective equipment or parts of the equipment without charge to the purchas er which are returned shipping prepaid to the KRI fa...

Page 67: ...tion repairs or replacement during Warranty or repairs there after please contact Kaufman Robinson Inc 1306 Blue Spruce Dr Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 www ionsources...

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