INSTALLATION 3-5
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
puri
fi
er is used in the hollow cathode gas line, it should be located upstream
from the mass
fl
ow controller.
• There is a two pin interlock connector located on the back of the Auto Con-
troller. The unit comes supplied with a jumper installed in the interlock con-
nector. The Auto Controller disables the outputs of the power supplies if this
contact is open. If a system interlock is used, a separate isolated contact
should be connected to each of the four interlock connectors.
• If remote control of the auto controller is used, that cable can be attached at
this time to the female DB-25 connector, the female DB-37 connector or the
female DB-9 connector. These remote interfaces require knowledge of the
ion source operation, which is given in the next two sections of this manual.
The detailed descriptions for remote control are in Section 6 REMOTE/AU-
TOMATED CONTROL of this manual.
• The connections between the pressure regulators and the
fl
ow controller
valves should be made with clean (passivated or hydrocarbon free) stain-
less steel tubing, with all
fi
ttings properly installed. Plastic tubing should not
be used to avoid contamination of the gas.
Table 3-3. Pin descriptions for the rear panel DB-15 female MFC output con-
nectors.
Pin
Number
Description
1
Common for 0-5 volt setpoint.
2
0-5 V
fl
ow read back signal from MFC, referenced to pin 10.
3
Not used.
4
Valve off. Connected to common when the setpoint
fl
ow is set to zero
or when the Auto Controller is in Standby, otherwise
fl
oated.
5
+15 V, referenced to pin 9.
6
-15 V, referenced to pin 9.
7
Not used.
8
0-5 V setpoint out to MFC, referenced to pin 1.
9
Power common for ± 15 V.
10
Common for read back signal.
11
Not used.
12
Not used.
