Instruction Manual IGM402 Hornet
InstruTech
Page 18
Bakeout
4
4.1
Bakeout - Ionization gauge sensor
If desired, a chamber bake may be performed for new systems or after routine maintenance. The IGM402
sensor can be baked out to 200
o
C as long as the sensor fitting uses metal seals. For sensor fittings using
elastomer O-rings, the maximum bakeout temperature is limited to the maximum temperature rating of the
elastomer O-ring. Ensure the temperature of the sensor tube and the vacuum fitting to the sensor is at the
same or above the chamber temperature. The electronic module must be removed from the sensor if the bake-
out temperature is to exceed 70
o
C. To bake out the sensor use the following procedure:
1. Turn off power to the IGM402.
2. Disconnect the cable from the IGM402.
3. Use a 3/32 in. size Hex key to remove the #4-40 socket head cap screws (SHCS) as shown below.
4. Detach the metal enclosure and the electronics from the sensor. Gently pull the electronics enclosure away
from the sensor using a gentle rocking motion.
5. The black plastic cap attached to the sensor and the end plate does not have to be removed for bakeout.
6. Perform bake out with the electronics removed.
7. Reattach the electronics enclosure. Reinstall the screws (4 ea.)
4.2
Bakeout - Convection vacuum gauges CG1 and CG2
The InstruTech Worker Bee convection vacuum gauges
CG1 and CG2 can be baked out to 150
o
C. The CG1 and
CG2 connectors and cables must be removed prior to bake out.
