Inficon Transpector MPH, Operating Manual, Page: 149 / 160

11 - 2
Transpector MPH Operating Manual
11.5 Resolution
11.6 Temperature Coefficient
11.7 Sensitivity
11.8 Minimum Detectable Partial Pressure
11.9 Zero Blast Interference at Mass 2
Peak Width (AMU) at 10% of peak height
MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M
0.9 AMU
During an eight hour period, after thirty minutes of warm up
MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M
For FC Only—Less than 1% of peak height per °C
Amps/Torr [mbar] (Pa)
MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M
FC 6x10
-4
[4.5x10
-4
]
(4.5x10
-6
)
6x10
-4
[4.5x10
-4
]
(4.5x10
-6
)
5x10
-4
[3.8x10
-4
]
(3.7x10
-6
)
5x10
-4
[3.8x10
-4
]
(3.7x10
-6
)
4x10
-4
[3x10
-5
]
(3x10
-6
)
4x10
-4
[3x10
-5
]
(3x10
-6
)
Torr [mbar] (Pa)
MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M
FC 3x10
-13
[4x10
-13
]
(4x10
-11
)
N/A 4x10
-13
[5.3x10
-13
]
(5.3x10
-11
)
N/A 5x10
-13
[6.7x10
-13
]
(6.6x10
-11
)
N/A
EM N/A 2x10
-15
[2.7x10
-15
]
(2.6x10
-13
)
N/A 3x10
-15
[4x10
-15
]
(5.3x10
-13
)
N/A 4x10
-15
[5.3x10
-15
]
(5.3x10
-13
)
ppm
MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M
<5 ppm <65 ppm <100 ppm